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利用同步辐射和微机械硅片的衰减全反射傅里叶变换红外(ATR FT-IR)光谱显微镜在微流控应用中。

Attenuated Total Reflection Fourier Transform Infrared (ATR FT-IR) Spectromicroscopy Using Synchrotron Radiation and Micromachined Silicon Wafers for Microfluidic Applications.

机构信息

Department of Chemistry, University of Saskatchewan, Saskatoon, SK, Canada.

Canadian Light Source, Saskatoon, SK, Canada.

出版信息

Appl Spectrosc. 2018 Dec;72(12):1781-1789. doi: 10.1177/0003702818785640. Epub 2018 Aug 23.

Abstract

A custom-designed optical configuration compatible with the use of micromachined multigroove internal reflection elements (μ-groove IREs) for attenuated total reflectance Fourier transform infrared (ATR FT-IR) spectroscopy and imaging applications in microfluidic devices is described. The μ-groove IREs consist of several face-angled grooves etched into a single, monolithic silicon chip. The optical configuration permits individual grooves to be addressed by focusing synchrotron sourced IR light through a 150 µm pinhole aperture, restricting the beam spot size to a dimension smaller than that of the groove walls. The effective beam spot diameter at the ATR sampling plane is determined through deconvolution of the measured detector response and found to be 70 µm. The μ-groove IREs are highly compatible with standard photolithographic techniques as demonstrated by printing a 400 µm wide channel in an SU-8 film spin-coated on the IRE surface. Attenuated total reflection FT-IR mapping as a function of sample position across the channel illustrates the potential application of this approach for rapid prototyping of microfluidic devices.

摘要

描述了一种与微加工多槽内反射元件(μ-groove IRE)兼容的定制光学配置,用于微流控器件中的衰减全反射傅里叶变换红外(ATR FT-IR)光谱和成像应用。μ-groove IRE 由几个面角槽蚀刻到单个单片硅芯片上。光学配置允许通过聚焦同步辐射源 IR 光通过 150 µm 针孔孔径来寻址单个槽,将光束光斑尺寸限制在小于槽壁的尺寸。ATR 采样平面处的有效光束光斑直径通过对测量的探测器响应进行反卷积确定,发现为 70 µm。μ-groove IRE 与标准光刻技术高度兼容,如在 IRE 表面旋涂的 SU-8 薄膜上打印 400 µm 宽的通道所示。ATR FT-IR 映射作为样品在通道上的位置的函数,说明了这种方法在微流控器件快速原型制作中的潜在应用。

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