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基于空芯光子带隙光纤的无膜气压传感器探头。

Diaphragm-free gas-pressure sensor probe based on hollow-core photonic bandgap fiber.

出版信息

Opt Lett. 2018 Jul 1;43(13):3017-3020. doi: 10.1364/OL.43.003017.

DOI:10.1364/OL.43.003017
PMID:29957770
Abstract

A diaphragm-free probe-type gas-pressure sensor is proposed and experimentally demonstrated based on a hollow-core photonic bandgap fiber (HC-PBF) with a quartz capillary. The section of the HC-PBF acts as a Fabry-Perot cavity, and the quartz capillary acts as a microfluidic channel for a gas inlet. An inner diameter of the quartz capillary (∼2  μm) smaller than the HC-PBF (∼10.9  μm) ensures a mirror reflection and a microfluidic channel simultaneously. The sensor probe has a minimal size (∼125  μm) and can function at gas pressures as high as 8 MPa. A higher pressure test is limited by our gas-pressure generation devices. Excellent stability of the sensor is observed in a long timescale, and repeatability of the sensor is confirmed by tests of six different samples. Compared with conventional optical fiber gas-pressure sensors, the proposed sensor involves a simple fabrication process and can acquire probe measurements with high sensitivity (∼4.17  nm/MPa), excellent linearity (0.9999), fast response, and no hysteresis. The proposed sensor can also function at temperatures as high as 800°C, which is beneficial for high pressure measurements in extreme conditions. Moreover, the fast response of the sensor is attractive for dynamic pressure measurements, which needs further study and characterization.

摘要

提出并实验验证了一种基于带石英毛细管的空芯光子带隙光纤(HC-PBF)的无膜探头式气压传感器。该 HC-PBF 的部分用作法布里-珀罗腔,石英毛细管用作气体入口的微流道。石英毛细管的内径(∼2μm)小于 HC-PBF 的内径(∼10.9μm),可确保微流道和镜面反射同时实现。传感器探头的尺寸很小(∼125μm),可在高达 8 MPa 的气压下工作。更高的压力测试受到我们气压发生装置的限制。传感器在长时间内表现出优异的稳定性,通过对六个不同样品的测试,验证了传感器的重复性。与传统的光纤气压传感器相比,所提出的传感器具有简单的制造工艺,可以实现具有高灵敏度(∼4.17nm/MPa)、优异线性度(0.9999)、快速响应和无迟滞的探头测量。该传感器还可以在高达 800°C 的温度下工作,这有利于在极端条件下进行高压测量。此外,传感器的快速响应对于动态压力测量很有吸引力,需要进一步的研究和特性描述。

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