Opt Lett. 2018 Jul 1;43(13):3017-3020. doi: 10.1364/OL.43.003017.
A diaphragm-free probe-type gas-pressure sensor is proposed and experimentally demonstrated based on a hollow-core photonic bandgap fiber (HC-PBF) with a quartz capillary. The section of the HC-PBF acts as a Fabry-Perot cavity, and the quartz capillary acts as a microfluidic channel for a gas inlet. An inner diameter of the quartz capillary (∼2 μm) smaller than the HC-PBF (∼10.9 μm) ensures a mirror reflection and a microfluidic channel simultaneously. The sensor probe has a minimal size (∼125 μm) and can function at gas pressures as high as 8 MPa. A higher pressure test is limited by our gas-pressure generation devices. Excellent stability of the sensor is observed in a long timescale, and repeatability of the sensor is confirmed by tests of six different samples. Compared with conventional optical fiber gas-pressure sensors, the proposed sensor involves a simple fabrication process and can acquire probe measurements with high sensitivity (∼4.17 nm/MPa), excellent linearity (0.9999), fast response, and no hysteresis. The proposed sensor can also function at temperatures as high as 800°C, which is beneficial for high pressure measurements in extreme conditions. Moreover, the fast response of the sensor is attractive for dynamic pressure measurements, which needs further study and characterization.
提出并实验验证了一种基于带石英毛细管的空芯光子带隙光纤(HC-PBF)的无膜探头式气压传感器。该 HC-PBF 的部分用作法布里-珀罗腔,石英毛细管用作气体入口的微流道。石英毛细管的内径(∼2μm)小于 HC-PBF 的内径(∼10.9μm),可确保微流道和镜面反射同时实现。传感器探头的尺寸很小(∼125μm),可在高达 8 MPa 的气压下工作。更高的压力测试受到我们气压发生装置的限制。传感器在长时间内表现出优异的稳定性,通过对六个不同样品的测试,验证了传感器的重复性。与传统的光纤气压传感器相比,所提出的传感器具有简单的制造工艺,可以实现具有高灵敏度(∼4.17nm/MPa)、优异线性度(0.9999)、快速响应和无迟滞的探头测量。该传感器还可以在高达 800°C 的温度下工作,这有利于在极端条件下进行高压测量。此外,传感器的快速响应对于动态压力测量很有吸引力,需要进一步的研究和特性描述。