Jeong Seok-Hwan, Tanaka Yu
Appl Opt. 2018 Aug 1;57(22):6474-6480. doi: 10.1364/AO.57.006474.
We report better spectral uniformity in Si-wire-based multistage delayed Mach-Zehnder interferometer (DMZI) type optical multiplexers/demultiplexers (MUX/DeMUX). Based on a 300 mm silicon-on-insulator wafer-scale ArF-immersion lithography process that guarantees higher phase controllability for low insertion loss, spectral flatness, and low crosstalk, we were able to further improve spectral uniformity across the wafer by optimizing the waveguide width within the optical path of each DMZI region. Irrespective of channel spacing in the wavelength domain, it was experimentally demonstrated that the filter spectral center wavelength deviation of the proposed DeMUXs was three times smaller than that of conventional ones. The proposed device scheme would also be attractive for arbitrary channel spacing and channel count, which makes the proposed scheme more practical in high-performance wavelength division multiplexing optical transceivers.
我们报告了基于硅线的多级延迟马赫曾德尔干涉仪（DMZI）型光复用器/解复用器（MUX/DeMUX）具有更好的光谱均匀性。基于300毫米绝缘体上硅晶圆级ArF浸没光刻工艺，该工艺可确保在低插入损耗、光谱平坦度和低串扰方面具有更高的相位可控性，我们通过优化每个DMZI区域光路内的波导宽度，进一步提高了整个晶圆的光谱均匀性。无论波长域中的信道间距如何，实验证明，所提出的解复用器的滤波器光谱中心波长偏差比传统解复用器小三倍。所提出的器件方案对于任意信道间距和信道数量也具有吸引力，这使得所提出的方案在高性能波分复用光收发器中更具实用性。
