Wang Donglin, Liu Hongqiong, Zhang Jicheng, Chen Qiao, Wang Wei, Zhang Xiaoyang, Xie Huikai
Appl Opt. 2018 Jul 20;57(21):5956-5961. doi: 10.1364/AO.57.005956.
This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.
本文介绍了一种由H形电热微机电系统（MEMS）镜实现的微型傅里叶变换红外光谱仪（μFTIR）。开发了一种特殊的驱动方法，以实现186μm的线性、匀速运动，MEMS镜的倾斜角度小至0.06°，因此无需复杂的闭环控制。在μFTIR的干涉仪中采用了远心透镜，以减少MEMS镜倾斜效应的影响。此外，在光谱重建过程中应用了一种新的相位插值算法，取代了传统的条纹间隔法，以提高光谱稳定性。最后，将新型μFTIR应用于大豆成分预测，实验结果表明它能够准确测量谷物水分、蛋白质和脂肪含量。
