Eifler Matthias, Hering Julian, von Freymann Georg, Seewig Jörg
Opt Express. 2018 Jun 25;26(13):16609-16623. doi: 10.1364/OE.26.016609.
Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample.
面积光学表面形貌测量是一种用于工业质量控制的新兴技术。然而，校准程序和材料测量的使用都未标准化。目前的技术水平是使用多个校准样品（材料测量）对一组计量特性进行校准。在此，我们提出了一种新的校准样品（工件），它能够仅在一个样品中提供整套相关的计量特性。我们的校准工件具有多种材料测量，并且是通过双光子激光光刻（直接激光写入，DLW）制造的。这使得仅通过一系列测量就能对面积形貌测量仪器进行全面校准，而无需更换样品。
