Mechanical Engineering Department, KU Leuven, 3000 Leuven, Belgium.
Sensors (Basel). 2019 Sep 22;19(19):4100. doi: 10.3390/s19194100.
Displacement laser interferometer systems are widely used for the calibration of machine tools and CMMs (Coordinate Measuring Machines). Additionally, they are often the workhorse in dimensional calibration laboratories, where they act as the basic metrological traceability link for many calibrations. This paper gives a review of the calibration of such systems, where several approaches, such as the calibrations of separate components or the system as a whole, are reviewed. The calibrations discussed are: the laser frequency, the counting system, software evaluation of the environmental conditions, environmental and material temperature sensor calibration and the calibration of optics that is part of the system. For these calibrations considerations are given about the ways these can be carried out and about establishing the re-calibration intervals.
位移激光干涉仪系统广泛用于机床和坐标测量机（CMM）的校准。此外，它们通常是尺寸校准实验室中的主力，作为许多校准的基本计量可追溯性链接。本文回顾了此类系统的校准，其中回顾了几种方法，例如单独组件或整个系统的校准。所讨论的校准包括：激光频率、计数系统、软件评估环境条件、环境和材料温度传感器校准以及系统光学部分的校准。对于这些校准，考虑了如何进行这些校准以及如何确定重新校准间隔。
