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光学显微镜校准工业标准的设计

Design of Industrial Standards for the Calibration of Optical Microscopes.

作者信息

Mínguez Martínez Alberto, Gómez Pérez Cecilia, Pérez-Caballero David Canteli, Carcedo Cerezo Laura, de Vicente Y Oliva Jesús

机构信息

Laboratory of Metrology and Metrotechnics (LMM), School of Industrial Engineering, Technical University of Madrid, José Gutiérrez Abascal, 2, 28006 Madrid, Spain.

Laser Center, Technical University of Madrid, Campus Sur, Edificio "La Arboleda", Alan Turing, 1, 28031 Madrid, Spain.

出版信息

Materials (Basel). 2020 Dec 23;14(1):29. doi: 10.3390/ma14010029.

DOI:10.3390/ma14010029
PMID:33374680
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7793534/
Abstract

One of the most important fields of study in material science is surface characterization. This topic is currently a field of growing interest as many functional properties depend on the surface texture. In this paper the authors, after a short a review of different methods for surface topography characterization and the determination of the traceability problems that arise in this type of measurements, propose four different designs of material standards that can be used to calibrate the most common optical measuring instruments used for these tasks, such as measuring microscopes, metallurgical microscopes, confocal microscopes, focus variation microscopes, etc. The authors consider that the use of this type of standards (or others similar to them) could provide a step forward in assuring metrological traceability for different metrological characteristics that enables a more precise measurement of surface features with optical measuring instruments. In addition, authors expect that this work could lay the groundwork for the development of custom standards with specialized features tuned to gain a better metrological control when measuring specific geometrical surface properties.

摘要

材料科学中最重要的研究领域之一是表面表征。由于许多功能特性取决于表面纹理,这个主题目前是一个越来越受关注的领域。在本文中,作者在简要回顾了表面形貌表征的不同方法以及这类测量中出现的可追溯性问题的确定之后,提出了四种不同设计的材料标准,这些标准可用于校准用于这些任务的最常见光学测量仪器,如测量显微镜、金相显微镜、共聚焦显微镜、聚焦变化显微镜等。作者认为,使用这类标准(或与其类似的其他标准)可以在确保不同计量特性的计量可追溯性方面向前迈出一步,从而能够使用光学测量仪器更精确地测量表面特征。此外,作者期望这项工作能够为开发具有专门特性的定制标准奠定基础,这些标准经过调整以在测量特定几何表面特性时获得更好的计量控制。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a9d4f515abc4/materials-14-00029-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/8fe19f334ea1/materials-14-00029-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/b6f8a78fe6db/materials-14-00029-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/54c0aaf3051e/materials-14-00029-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/c320466f5221/materials-14-00029-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a528e605c457/materials-14-00029-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/637c0727317f/materials-14-00029-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/fccab275eeca/materials-14-00029-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a9f53a1cf3da/materials-14-00029-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/140b7a430cb1/materials-14-00029-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/7e5b135a30c6/materials-14-00029-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a1dc52e6b2e8/materials-14-00029-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/4aeea0752630/materials-14-00029-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/d53b5ddcb63c/materials-14-00029-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a0b2c6d7a549/materials-14-00029-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a9d4f515abc4/materials-14-00029-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/8fe19f334ea1/materials-14-00029-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/b6f8a78fe6db/materials-14-00029-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/54c0aaf3051e/materials-14-00029-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/c320466f5221/materials-14-00029-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a528e605c457/materials-14-00029-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/637c0727317f/materials-14-00029-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/fccab275eeca/materials-14-00029-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a9f53a1cf3da/materials-14-00029-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/140b7a430cb1/materials-14-00029-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/7e5b135a30c6/materials-14-00029-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a1dc52e6b2e8/materials-14-00029-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/4aeea0752630/materials-14-00029-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/d53b5ddcb63c/materials-14-00029-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a0b2c6d7a549/materials-14-00029-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/21cc/7793534/a9d4f515abc4/materials-14-00029-g015.jpg

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本文引用的文献

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Industrial Calibration Procedure for Confocal Microscopes.共聚焦显微镜的工业校准程序
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