Wang Xia, Lü Hao, Zhao Qiu-ling, Zhang Shuai-yi, Tam Wing-yim
Guang Pu Xue Yu Guang Pu Fen Xi. 2016 Nov;36(11):3461-9.
Micro-nano photonic structures are developing vigorously based on the progress of photonics, semiconductor physics and microfabrication technology. A series of results are achieved in structure characterization, theory, and fabrication of them. Most high quality photonic structures are man-made ones; however, there are still some challenges in fabricating artificial large-area and high-quality photon materials. With the advantages of photonic structure processing technology, holographic lithography, a low-cost, time-saving and high-efficiency microfabrication method, performs superior application potentials in making metamaterials as well as photonic crystal templates. In this article, we introduced the principles of holographic lithography and described the applications in fabricating various micro-nano photonic structures, such as three dimensional face-center-cubic, wood-pile, diamond-like photonic crystals, as well as quasi-crystalline structure, chiral metamaterials and periodic defect-mode structures. Moreover, the applications of some structures in solar cell and optical fiber sensing are discussed. The success of fabricating micro-nano photonic structures by holographic lithography would pave the way for more applications of these structures in wide fields.
基于光子学、半导体物理学和微纳加工技术的进步，微纳光子结构正在蓬勃发展。在其结构表征、理论和制造方面取得了一系列成果。大多数高质量的光子结构是人造的；然而，在制造大面积、高质量的人工光子材料方面仍然存在一些挑战。全息光刻作为一种具有光子结构加工技术优势的低成本、省时且高效的微纳加工方法，在制造超材料以及光子晶体模板方面具有卓越的应用潜力。在本文中，我们介绍了全息光刻的原理，并描述了其在制造各种微纳光子结构中的应用，如三维面心立方、木堆、类金刚石光子晶体，以及准晶结构、手性超材料和周期性缺陷模式结构。此外，还讨论了一些结构在太阳能电池和光纤传感中的应用。通过全息光刻制造微纳光子结构的成功将为这些结构在广泛领域的更多应用铺平道路。
