[Research progress of micro-electro-mechanical systems micro gas chromatography columns].

The gas chromatography (GC) column is a key component of the gas chromatographic system, which is mainly used for the separation of mixed gas components. Compared with the traditional GC column, the micro GC column based on micro-electro-mechanical systems (MEMS) technology has the advantages of lighter weight, smaller volume, lower power consumption, and faster analysis. Furthermore, it can be integrated into a portable instrument, such as a miniaturized GC. The research progress of micro GC columns based on MEMS technology is summarized in this paper. First, the theoretical basis of the MEMS micro GC column is stated. Then, the layout and inner structure of the MEMS micro GC column, the stationary-phase support, and the preparation of the stationary phase are summarized. Finally, trends in the development of MEMS micro GC columns are discussed.