[High-aspect-ratio gas chromatography column based on micro-electro-mechanical system technology].

Miniaturization of gas chromatography (GC) columns is one of the key problems associated with microminiaturization of a chromatograph. In this study, a GC column with high-aspect-ratio microchannel based on micro-electro-mechanical system (MEMS) technology has been designed and manufactured. Simulation and analysis by the COMSOL software revealed that the GC column has even velocity field distribution, which is crucial for improving the separation efficiency of the column. The results show that heavy hydrocarbons (C6-C10) and compounds of benzene series can be successfully separated. The number of theoretical plate is 14028 plates/m, and the resolution of C7-C8 is 10.82. Due to its advantages of smaller volume, lower energy consumption, and better separation performance, the GC column can be applied in micro gas chromatography.