State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.
J Chromatogr A. 2022 Jan 11;1662:462725. doi: 10.1016/j.chroma.2021.462725. Epub 2021 Dec 4.
Semi-packed columns are microfabricated gas chromatography columns which have a large surface area and high aspect ratio. In this paper, a new semi-packed column with high-density elliptic cylindrical posts (SCHECP) made by a micro-electro-mechanical system (MEMS) technique was reported. Compared to a semi-packed column with cylindrical posts (SCCP) under the same effective width, the surface area and aspect ratio of SCHECP were improved by 71.19% and 76.47%, respectively. To compare the performance of these two semi-packed columns, SCHECP and SCCP were fabricated. A 10-nm thick alumina film was deposited as the stationary phase by atomic layer deposition technique to ensure the uniformity and repeatability of the stationary-phase film. A contrast experiment was conducted, and the results showed that compared with SCCP, better separation performance was realized in SCHECP due to the increase in surface area and aspect ratio. The number of theoretical plates of nonane was increased by 541.84%, and the tailing factor was decreased by 54.31%.
半填充柱是微制造的气相色谱柱，具有较大的表面积和高纵横比。本文报道了一种通过微机电系统（MEMS）技术制造的新型高密度椭圆形柱状半填充柱（SCHECP）。与具有相同有效宽度的圆柱形柱状半填充柱（SCCP）相比，SCHECP 的表面积和纵横比分别提高了 71.19%和 76.47%。为了比较这两种半填充柱的性能，制备了 SCHECP 和 SCCP。通过原子层沉积技术沉积了 10nm 厚的氧化铝薄膜作为固定相，以确保固定相薄膜的均匀性和重复性。进行了对比实验，结果表明，与 SCCP 相比，由于表面积和纵横比的增加，SCHECP 实现了更好的分离性能。正十一烷的理论塔板数增加了 541.84%，拖尾因子降低了 54.31%。
