Surface potential and charging of polymer films submitted to defocused electron beam irradiation.

The surface potentials and dynamic charging properties of polymers subjected to electron irradiation in scanning electron microscopy are investigated by using a novel method applied in parallel with simulation and experimental methods. We perform our simulation through a parallel computing method with various microscopic parameters. The results show that under the given microscopic parameters, the charging time concomitantly decreases as the film thickness, electron mobility, trap cross and recombination rate increase. The surface potential decreases as electron energy, beam current density, capture cross section, sample thickness and electron-hole recombination rate increase and as electron mobility decreases. Charging time increases with increasing beam density, sample thickness, recombination rate and change in capture cross-section, and decreases with increasing electron mobility. The primary-electron energy exhibits an inflection point at 35 keV. This study offers an intuitive analytical and measurement method for understanding microscopic charge characteristics in electron-based surface microscopy.