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基于超短沟道非晶氧化物半导体晶体管的高性能全溶液处理柔性光电探测器阵列。

High-Performance All-Solution-Processed Flexible Photodetector Arrays Based on Ultrashort Channel Amorphous Oxide Semiconductor Transistors.

机构信息

School of Mechanical Engineering and Automation , Fuzhou University , Fuzhou 350108 , China.

出版信息

ACS Appl Mater Interfaces. 2018 Nov 28;10(47):40631-40640. doi: 10.1021/acsami.8b14143. Epub 2018 Nov 13.

Abstract

Amorphous oxide semiconductor (AOS) field-effect phototransistors (FEPTs) are promising candidates for emerging photodetectors. Unfortunately, traditional lateral AOS FEPTs suffer from low photosensitivity, slow response time and inadequate mechanical flexibility, which restrict their widespread commercial application. In this work, novel AOS-based vertical field-effect phototransistor (VFEPT) arrays are presented, where the semiconducting layer and source and drain electrodes are deposited by inkjet printing. Benefitted from the unique vertical structure and ultrashort channel length, the exciton dissociation, carrier transfer, and collection efficiency were dramatically enhanced, resulting in excellent photoelectric performance in VFEPT devices, which was better than that of the traditional lateral AOS phototransistors. Moreover, flexible AOS VFEPT arrays were investigated for the first time on polyimide substrates. Due to the unique vertical architecture, the carrier transport was negligibly affected by the strain-induced in-plane cracks of the semiconductor channel layer during the mechanical bending process, which overcame the maximum bending limit of traditional lateral AOS thin-film transistors to ensure a transistor technique that gives notable mechanical robustness against repeated mechanical bending. Hence, this work provided a new pathway in emerging applications for AOS photodetectors with sensitivity, transparency, and flexibility.

摘要

非晶态氧化物半导体 (AOS) 场效应光电晶体管 (FEPT) 是新兴光电探测器的有前途的候选者。不幸的是,传统的横向 AOS FEPT 存在灵敏度低、响应时间慢和机械柔性不足等问题,限制了它们的广泛商业应用。在这项工作中,提出了新型基于 AOS 的垂直场效应光电晶体管 (VFEPT) 阵列,其中半导体层和源极和漏极通过喷墨打印沉积。受益于独特的垂直结构和超短沟道长度,激子解离、载流子转移和收集效率得到了显著提高,从而在 VFEPT 器件中实现了优异的光电性能,优于传统的横向 AOS 光电晶体管。此外,首次在聚酰亚胺衬底上研究了柔性 AOS VFEPT 阵列。由于独特的垂直结构,在机械弯曲过程中,半导体沟道层的平面内裂纹引起的应变对载流子输运的影响可以忽略不计,克服了传统横向 AOS 薄膜晶体管的最大弯曲极限,确保了晶体管技术具有出色的机械鲁棒性,能够抵抗反复的机械弯曲。因此,这项工作为具有灵敏度、透明度和柔韧性的 AOS 光电探测器的新兴应用提供了新途径。

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