Kang Byeong-Cheol, Ha Tae-Jun
Department of Electronic Materials Engineering, Kwangwoon University, Seoul 139-701, Republic of Korea.
J Nanosci Nanotechnol. 2019 Mar 1;19(3):1729-1733. doi: 10.1166/jnn.2019.16216.
During the fabrication processes for single-wall carbon nanotube thin-film transistors (SWCNT-TFTs), the impurities of organic residues such as photoresist and developer can be induced, which affects the charge transport. As a result, solution-processed SWCNT-TFTs exhibit poor and non-uniform device performance regardless of the intrinsic electrical characteristics. Here, we demonstrate a patterning technique using a selective surface treatment with solution-processed hydrophobic fluorocarbon copolymer in SWCNT-TFTs. By using the difference of wettability in a selective area, a channel region in SWCNT-TFTs can be patterned without the conventional photolithography and etching process. Furthermore, the optimized surface treatment results in denser random networks of SWCNTs in the channel patterned by such technique, compared to the dropcasted SWCNT. The statistical results of the key device metrics such as mobility and threshold voltage extracted from 30 SWCNT-TFTs conclusively prove the improved device performance of SWCNT-TFTs fabricated by such pattering technique. We believe that this work can provide a promising route to stimulate the process innovation of fabrication for high performance solution-processed electronics based on SWCNT random networks.
在单壁碳纳米管薄膜晶体管(SWCNT-TFTs)的制造过程中,可能会引入诸如光刻胶和显影剂等有机残留物杂质,这会影响电荷传输。因此,无论其本征电学特性如何,溶液处理的SWCNT-TFTs都表现出较差且不均匀的器件性能。在此,我们展示了一种在SWCNT-TFTs中使用溶液处理的疏水性氟碳共聚物进行选择性表面处理的图案化技术。通过利用选择性区域中润湿性的差异,可以在不进行传统光刻和蚀刻工艺的情况下对SWCNT-TFTs中的沟道区域进行图案化。此外,与滴铸的SWCNT相比,优化的表面处理使得通过该技术图案化的沟道中SWCNT的随机网络更加致密。从30个SWCNT-TFTs中提取的诸如迁移率和阈值电压等关键器件指标的统计结果确凿地证明了通过这种图案化技术制造的SWCNT-TFTs器件性能得到了改善。我们相信这项工作可以为基于SWCNT随机网络的高性能溶液处理电子产品的制造工艺创新提供一条有前景的途径。