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基于卷对h-BN管的管状3D电阻式随机存取存储器。

Tubular 3D Resistive Random Access Memory Based on Rolled-Up h-BN Tube.

作者信息

Hou Xiang, Pan Ruobing, Yu Qiang, Zhang Kai, Huang Gaoshan, Mei Yongfeng, Zhang David Wei, Zhou Peng

机构信息

State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China.

Department of Materials, Fudan University, Shanghai, 200433, China.

出版信息

Small. 2019 Feb;15(5):e1803876. doi: 10.1002/smll.201803876. Epub 2019 Jan 9.

Abstract

Due to their advantages compared with planar structures, rolled-up tubes have been applied in many fields, such as field-effect transistors, compact capacitors, inductors, and integrative sensors. On the other hand, because of its perfect insulating nature, ultrahigh mechanical strength and atomic thickness property, 2D hexagonal boron nitride (h-BN) is a very suitable material for rolled-up memory applications. In this work, a tubular 3D resistive random access memory (RRAM) device based on rolled-up h-BN tube is realized, which is achieved by self-rolled-up technology. The tubular RRAM device exhibits bipolar resistive switching behavior, nonvolatile data storage ability, and satisfactorily low programming current compared with other 2D material-based RRAM devices. Moreover, by releasing from the substrate, the footprint area of the tubular device is reduced by six times. This tubular RRAM device has great potential for increasing the data storage density, lowering the power consumption, and may be applied in the fields of rolled-up systems and sensing-storage integration.

摘要

由于与平面结构相比具有优势,卷绕管已应用于许多领域,如场效应晶体管、紧凑型电容器、电感器和集成传感器。另一方面,由于其完美的绝缘特性、超高的机械强度和原子厚度特性,二维六方氮化硼(h-BN)是一种非常适合用于卷绕式存储器应用的材料。在这项工作中,基于卷绕h-BN管实现了一种管状三维电阻式随机存取存储器(RRAM)器件,该器件通过自卷绕技术实现。与其他基于二维材料的RRAM器件相比,管状RRAM器件表现出双极电阻开关行为、非易失性数据存储能力和令人满意的低编程电流。此外,通过从衬底上释放,管状器件的占地面积减少了六倍。这种管状RRAM器件在提高数据存储密度、降低功耗方面具有巨大潜力,并且可能应用于卷绕式系统和传感-存储集成领域。

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