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一阶矩扫描透射电子显微镜(STEM)与传统微分相衬法的比较以及对电子剂量的依赖性。

Comparison of first moment STEM with conventional differential phase contrast and the dependence on electron dose.

作者信息

Müller-Caspary Knut, Krause Florian F, Winkler Florian, Béché Armand, Verbeeck Johan, Van Aert Sandra, Rosenauer Andreas

机构信息

EMAT, University of Antwerp, Groenenborgerlaan 171, Antwerpen, B-2020 Belgium; Ernst-Ruska Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Wilhelm-Johnen-Strasse, Jülich, 52425 Germany.

Institute for Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, Bremen, 28359 Germany.

出版信息

Ultramicroscopy. 2019 Aug;203:95-104. doi: 10.1016/j.ultramic.2018.12.018. Epub 2018 Dec 30.

Abstract

This study addresses the comparison of scanning transmission electron microscopy (STEM) measurements of momentum transfers using the first moment approach and the established method that uses segmented annular detectors. Using an ultrafast pixelated detector to acquire four-dimensional, momentum-resolved STEM signals, both the first moment calculation and the calculation of the differential phase contrast (DPC) signals are done for the same experimental data. In particular, we investigate the ability to correct the segment-based signal to yield a suitable approximation of the first moment for cases beyond the weak phase object approximation. It is found that the measurement of momentum transfers using segmented detectors can approach the first moment measurement as close as 0.13 h/nm in terms of a root mean square (rms) difference in 10 nm thick SrTiO for a detector with 16 segments. This amounts to 35% of the rms of the momentum transfers. In addition, we present a statistical analysis of the precision of first moment STEM as a function of dose. For typical experimental settings with recent hardware such as a Medipix3 Merlin camera attached to a probe-corrected STEM, we find that the precision of the measurement of momentum transfers stagnates above certain doses. This means that other instabilities such as specimen drift or scan noise have to be taken into account seriously for measurements that target, e.g., the detection of bonding effects in the charge density.

摘要

本研究探讨了使用一阶矩方法和使用分段环形探测器的既定方法对扫描透射电子显微镜(STEM)动量转移测量结果进行比较。使用超快像素化探测器获取四维动量分辨STEM信号,针对相同的实验数据进行一阶矩计算和微分相衬(DPC)信号计算。特别是,我们研究了校正基于分段的信号以在弱相位物体近似之外的情况下获得一阶矩合适近似值的能力。结果发现,对于具有16个分段的探测器,在10nm厚的SrTiO中,使用分段探测器测量动量转移与一阶矩测量的均方根(rms)差异可接近0.13 h/nm。这相当于动量转移均方根的35%。此外,我们给出了一阶矩STEM精度随剂量变化的统计分析。对于使用诸如连接到探针校正STEM的Medipix3 Merlin相机等最新硬件的典型实验设置,我们发现动量转移测量的精度在超过一定剂量后会停滞不前。这意味着对于例如旨在检测电荷密度中键合效应的测量,必须认真考虑其他不稳定性,如样品漂移或扫描噪声。

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