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具有AlO钝化的室温中波长红外InAsSb纳米线光电探测器阵列

Room-Temperature Midwavelength Infrared InAsSb Nanowire Photodetector Arrays with AlO Passivation.

作者信息

Ren Dingkun, Azizur-Rahman Khalifa M, Rong Zixuan, Juang Bor-Chau, Somasundaram Siddharth, Shahili Mohammad, Farrell Alan C, Williams Benjamin S, Huffaker Diana L

机构信息

Department of Electrical and Computer Engineering , University of California, Los Angeles , Los Angeles , California 90095 , United States.

School of Physics and Astronomy , Cardiff University , Cardiff , Wales CF24 3AA , United Kingdom.

出版信息

Nano Lett. 2019 May 8;19(5):2793-2802. doi: 10.1021/acs.nanolett.8b04420. Epub 2019 Jan 28.

Abstract

Developing uncooled photodetectors at midwavelength infrared (MWIR) is critical for various applications including remote sensing, heat seeking, spectroscopy, and more. In this study, we demonstrate room-temperature operation of nanowire-based photodetectors at MWIR composed of vertical selective-area InAsSb nanowire photoabsorber arrays on large bandgap InP substrate with nanoscale plasmonic gratings. We accomplish this by significantly suppressing the nonradiative recombination at the InAsSb nanowire surfaces by introducing ex situ conformal AlO passivation shells. Transient simulations estimate an extremely low surface recombination velocity on the order of 10 cm/s. We further achieve room-temperature photoluminescence emission from InAsSb nanowires, spanning the entire MWIR regime from 3 to 5 μm. A dry-etching process is developed to expose only the top nanowire facets for metal contacts, with the sidewalls conformally covered by AlO shells, allowing for a higher internal quantum efficiency. Based on these techniques, we fabricate nanowire photodetectors with an optimized pitch and diameter and demonstrate room-temperature spectral response with MWIR detection signatures up to 3.4 μm. The results of this work indicate that uncooled focal plane arrays at MWIR on low-cost InP substrates can be designed with nanostructured absorbers for highly compact and fully integrated detection platforms.

摘要

开发中波长红外(MWIR)非制冷光电探测器对于包括遥感、热寻的、光谱学等各种应用至关重要。在本研究中,我们展示了基于纳米线的MWIR光电探测器在室温下的工作情况,该探测器由垂直选择性区域的InAsSb纳米线光吸收体阵列组成,位于具有纳米级等离子体光栅的大带隙InP衬底上。我们通过引入非原位共形AlO钝化壳层显著抑制InAsSb纳米线表面的非辐射复合来实现这一点。瞬态模拟估计表面复合速度极低,约为10 cm/s。我们进一步实现了InAsSb纳米线在室温下的光致发光发射,覆盖了从3到5μm的整个MWIR波段。开发了一种干法蚀刻工艺,仅暴露顶部纳米线小面用于金属接触,侧壁由AlO壳层共形覆盖,从而实现更高的内量子效率。基于这些技术,我们制造了具有优化间距和直径的纳米线光电探测器,并展示了室温光谱响应,MWIR探测特征波长可达3.4μm。这项工作的结果表明,基于低成本InP衬底的MWIR非制冷焦平面阵列可以通过纳米结构吸收体设计用于高度紧凑和完全集成的探测平台。

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