School of Electronic and Information Engineering , Beijing Jiaotong University , Beijing 100044 , China.
Key Laboratory of Microelectronics Devices & Integrated Technology , IC Advanced Process R&D Center, Institute of Microelectronics of Chinese Academy of Sciences (IMECAS) , Beijing 100029 , China.
Nano Lett. 2019 Mar 13;19(3):1494-1503. doi: 10.1021/acs.nanolett.8b04099. Epub 2019 Feb 7.
Graphene is an ideal material for high-performance photodetectors because of its superior electronic and optical properties. However, graphene's weak optical absorption limits the photoresponsivity of conventional photodetectors based on planar (two-dimensional or 2D) back-gated graphene field-effect transistors (GFETs). Here, we report a self-rolled-up method to turn 2D buried-gate GFETs into three-dimensional (3D) tubular GFETs. Because the optical field inside the tubular resonant microcavity is enhanced and the light-graphene interaction area is increased, the photoresponsivity of the resulting 3D GFETs is significantly improved. The 3D GFET photodetectors demonstrated room-temperature photodetection at ultraviolet, visible, mid-infrared, and terahertz (THz) regions, with both ultraviolet and visible photoresponsivities of more than 1 A W and photoresponsivity of 0.232 A W at 3.11 THz. The electrical bandwidth of these devices exceeds 1 MHz. This combination of high photoresponsivity, a broad spectral range, and high speed will lead to new opportunities for 3D graphene optoelectronic devices and systems.
石墨烯具有优异的电子和光学性能,是高性能光探测器的理想材料。然而,由于石墨烯的光吸收较弱,限制了基于平面(二维或 2D)背栅石墨烯场效应晶体管(GFET)的传统光探测器的光响应度。在这里,我们报告了一种自卷法,将 2D 埋栅 GFET 转化为三维(3D)管状 GFET。由于管状共振微腔内部的光场得到增强,并且增加了光-石墨烯相互作用面积,因此所得 3D GFET 的光响应度得到显著提高。所制备的 3D GFET 光探测器在紫外、可见、中红外和太赫兹(THz)区域实现了室温下的光探测,在紫外和可见光下的光响应度均超过 1 A W,在 3.11 THz 时的光响应度为 0.232 A W。这些器件的电带宽超过 1 MHz。这种高的光响应度、宽的光谱范围和高速的组合将为 3D 石墨烯光电设备和系统带来新的机遇。