Inertial motor on a single piezoelectric actuator for a low-temperature near-field scanning optical microscope.
作者信息
Mishakov G V, Demikhov E I, Sharkov A V
机构信息
Federal Scientific Research Centre "Crystallography and Photonics," Russian Academy of Sciences, 119333 Moscow, Russia.
P. N. Lebedev Physical Institute, Russian Academy of Sciences, 119991 Moscow, Russia.
出版信息
Rev Sci Instrum. 2019 Jan;90(1):016103. doi: 10.1063/1.5054107.
The impact of such factors as the shape of the applied voltage pulse, the friction force, and the mass of the movable part on the motor operation at low temperatures is experimentally investigated. Important added features in the motor design are support springs. These springs prevent one part of the slider clamp from shifting relative to the other during motion. The optimization of the factors listed above provided for reliable withdrawal of the microscope's fiber probe with a speed of up to 0.2 µm/step at a temperature of 5 K.
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