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基于二氧化硅中氢复合物缺陷的石墨烯场效应晶体管的光致滞后现象。

Photoinduced Hysteresis of Graphene Field-Effect Transistors Due to Hydrogen-Complexed Defects in Silicon Dioxide.

机构信息

Science and Technology on Analog Integrated Circuit Laboratory , Chongqing 401332 , China.

出版信息

ACS Appl Mater Interfaces. 2019 Mar 27;11(12):12170-12178. doi: 10.1021/acsami.9b02400. Epub 2019 Mar 18.

DOI:10.1021/acsami.9b02400
PMID:30843687
Abstract

Photoinduced hysteresis (PIH) of graphene field-effect transistors (G-FETs) has attracted attention because of its potential in developing photoelectronic or nonvolatile memory devices. In this work, we focused on the role of SiO dielectric layer on PIH, where G-FETs have only a SiO dielectric layer. Adsorbates are effectively removed before the PIH test. The effects of laser wavelength, laser power density, and temperature on the PIH are systematically investigated. The PIH is significantly enhanced by increasing the hydrogen flow in a hydrogen-atmosphere device thermal annealing. This strongly suggests proton-related defects that play a key role. The pure electronic process for PIH is further ruled out by the significant dependence of the doping rate on the temperature. A mechanism of PIH based on proton generation after hole trapping at [O≡Si-H] is proposed. The proposed mechanism is well-supported by our experimental data: (1) the observed threshold photon energy for PIH is between 2.76 and 2.34 eV, which is close to the energy barrier for [O≡Si-H], releasing a proton. (2) No obvious carrier mobility degradation after the PIH process suggests that the bulk defects in SiO are the major contributors rather than graphene/SiO interface defects. (3) The dependence of the doping rate on the temperature and the laser power density matches a theoretical model based on the random hopping of H. The results in this work are also valuable for the study of degradation of other oxide dielectric materials in various field-effect transistors.

摘要

光诱导滞后(PIH)的石墨烯场效应晶体管(G-FET)因其在开发光电或非易失性存储器件方面的潜力而受到关注。在这项工作中,我们专注于 SiO 介电层对 PIH 的作用,其中 G-FET 只有 SiO 介电层。在进行 PIH 测试之前,吸附物被有效去除。系统研究了激光波长、激光功率密度和温度对 PIH 的影响。在氢气气氛装置热退火中增加氢气流量,显著增强了 PIH。这强烈表明质子相关缺陷起着关键作用。掺杂率对温度的显著依赖性进一步排除了 PIH 的纯电子过程。提出了一种基于空穴在[O≡Si-H]中捕获后产生质子的 PIH 机制。所提出的机制得到了我们实验数据的有力支持:(1)观察到的 PIH 阈值光子能量在 2.76 和 2.34 eV 之间,接近释放质子的[O≡Si-H]的能垒。(2)PIH 过程后载流子迁移率没有明显降低表明 SiO 中的体缺陷是主要贡献者,而不是石墨烯/SiO 界面缺陷。(3)掺杂率对温度和激光功率密度的依赖性与基于 H 随机跳跃的理论模型相匹配。这项工作的结果对于研究各种场效应晶体管中其他氧化物介电材料的降解也具有重要价值。

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