Zia Muneeb, Chung Bryce, Sober Samuel J, Bakir Muhannad S
Georgia Institute of Technology, Atlanta, GA, USA,
Emory University, Atlanta, GA, USA.
Tech Dig Int Electron Devices Meet. 2018 Dec;2018:29.4.1-29.4.4. doi: 10.1109/IEDM.2018.8614503. Epub 2019 Jan 17.
This work presents fabrication and characterization of flexible three-dimensional (3D) multi-electrode arrays (MEAs) capable of high signal-to-noise (SNR) electromyogram (EMG) recordings from the expiratory muscle of a songbird. The fabrication utilizes a photoresist reflow process to obtain 3D structures to serve as the electrodes. A polyimide base with a PDMS top insulation was utilized to ensure flexibility and biocompatibility of the fabricated 3D MEA devices. SNR measurements from the fabricated 3D electrode show up to a 7x improvement as compared to the 2D MEAs.
这项工作展示了柔性三维(3D)多电极阵列(MEA)的制造与特性,该阵列能够从鸣禽的呼气肌肉进行高信噪比(SNR)的肌电图(EMG)记录。制造过程利用光刻胶回流工艺来获得用作电极的3D结构。采用带有聚二甲基硅氧烷(PDMS)顶部绝缘层的聚酰亚胺基底,以确保所制造的3D MEA器件的柔韧性和生物相容性。与二维MEA相比,所制造的3D电极的SNR测量结果显示出高达7倍的提升。