Rydosz Artur, Brudnik Andrzej, Staszek Kamil
Department of Electronics, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Krakow, Poland.
Materials (Basel). 2019 Mar 15;12(6):877. doi: 10.3390/ma12060877.
Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0⁻200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO₂-based gas sensors, while for methanol detection both dioxides, SnO₂ and TiO₂, exhibited good sensitivity.
通过磁控溅射技术沉积的金属氧化物薄膜，如氧化铜、二氧化钛和二氧化锡，被证实可作为在2.4 GHz下工作的微波气体传感器中的气敏层。所开发的气体传感器在室温（23°C）和50%相对湿度（RH）下进行测试，暴露于0⁻200 ppm的选定挥发性有机化合物（丙酮、乙醇和甲醇）中，这些化合物在工业和生物医学应用中备受关注。基于CuO的气体传感器对丙酮的响应最高，基于SnO₂的气体传感器对乙醇的响应最高，而对于甲醇检测，SnO₂和TiO₂这两种二氧化物都表现出良好的灵敏度。
