Franz Yohann, Runge Antoine F J, Oo Swe Z, Jimenez-Martinez Gregorio, Healy Noel, Khokhar Ali, Tarazona Antulio, Chong Harold M H, Mailis Sakellaris, Peacock Anna C
Opt Express. 2019 Feb 18;27(4):4462-4470. doi: 10.1364/OE.27.004462.
We report the fabrication of low-loss, low temperature deposited polysilicon waveguides via laser crystallization. The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Micro-Raman spectroscopy, Secco etching and X-ray diffraction measurements reveal the high crystalline quality of the processed waveguides with the formation of millimeter long crystal grains. Optical losses as low as 5.3 dB/cm have been measured, indicating their suitability for the development of high-density integrated circuits.
我们报告了通过激光结晶制备低损耗、低温沉积多晶硅波导的方法。该工艺包括对非晶硅薄膜进行预图案化，以在结晶阶段限制热能，这有助于控制晶粒生长并减少向周围介质的热传递，使其与CMOS集成兼容。显微拉曼光谱、Secco蚀刻和X射线衍射测量揭示了所加工波导的高结晶质量以及毫米长晶粒的形成。已测得低至5.3 dB/cm的光学损耗，表明它们适用于高密度集成电路的开发。
