Gao Wei, Wei Qilong, Ji Jianwei, Sun Pengfei, Ji Fang, Wang Chao, Xu Min
Opt Express. 2019 Mar 4;27(5):6268-6282. doi: 10.1364/OE.27.006268.
Traditional KDP polishing methods, such as magnetorheological finishing (MRF), ion-beam figuring (IBF), and chemical mechanical polishing (CMP), are limited by either hard-to-remove residual particles, unavoidable heating effect, or applicability that is restricted to large-sized KDP. The abrasive-free jet polishing (AFJP) is regarded as a promising polishing method that can circumvent the above issues. KDP AFJP makes use of a thermodynamically and kinetically stable ionic liquid (IL) microemulsion that contains nanometer range water droplets evenly dispersed in the non-aqueous carrier liquid. The sprayed out nanoscale water droplets can remove material through dissolution. In this paper, the normal impinging of a nanoscale water droplet on the KDP surface is investigated. And then a materials removal model is proposed for water droplets. This model considers two major modes, namely deformation of a water droplet in compressing and deformation restoring of a water droplet in slipping process. Finally, KDP AFJP spot experiments were then conducted to validate the model veracity. The proposed model fits well with the simulation and experimental results which further suggest KDP AFJP's feasibility. This proposed model provides a good explanation for KDP AFJP's removal mechanism.
传统的磷酸二氢钾(KDP)抛光方法,如磁流变抛光(MRF)、离子束修形(IBF)和化学机械抛光(CMP),要么受到难以去除的残留颗粒的限制,要么存在不可避免的热效应,或者其适用性仅限于大型KDP。无磨料喷射抛光(AFJP)被认为是一种有前途的抛光方法,可以规避上述问题。KDP AFJP利用了一种热力学和动力学稳定的离子液体(IL)微乳液,其中含有均匀分散在非水载液中的纳米级水滴。喷出的纳米级水滴可以通过溶解去除材料。本文研究了纳米级水滴在KDP表面的垂直撞击。然后提出了一个水滴的材料去除模型。该模型考虑了两种主要模式,即水滴压缩时的变形和滑动过程中水滴的变形恢复。最后,进行了KDP AFJP斑点实验以验证模型的准确性。所提出的模型与模拟和实验结果吻合良好,进一步表明了KDP AFJP的可行性。该模型为KDP AFJP的去除机制提供了很好的解释。