Gorecki C, Lullin J, Perrin S, Bargiel S, Albero J, Gaiffe O, Rutkowski J, Cote J M, Krauter J, Osten W, Wang W-S, Weimer M, Froemel J
FEMTO-ST Institute (UMR CNRS 6174, UBFC), 15B avenue des Montboucons, 25030 Besançon, France.
Institut für Technische Optik, Universiät Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany.
Biomed Opt Express. 2019 Feb 7;10(3):1111-1125. doi: 10.1364/BOE.10.001111. eCollection 2019 Mar 1.
OCT instruments permit fast and non-invasive 3D optical biopsies of biological tissues. However, they are bulky and expensive, making them only affordable at the hospital and thus, not sufficiently used as an early diagnostic tool. Significant reduction of system cost and size is achieved by implementation of MOEMS technologies. We propose an active array of 4x4 Mirau microinterferometers where the reference micro-mirrors are carried by a vertical comb-drive microactuator, enabling the implementation of the phase-shifting technique that improves the sensitivity and eliminates unwanted interferometric terms. We focus on the design of the imaging system, the microfabrication and the assembly of the Mirau microinterferometer, and the swept-source OCT imaging.
光学相干断层扫描（OCT）仪器能够对生物组织进行快速、非侵入性的三维光学活检。然而，它们体积庞大且价格昂贵，只有医院才能负担得起，因此，作为早期诊断工具的使用并不充分。通过采用微机电系统（MOEMS）技术，可大幅降低系统成本和尺寸。我们提出了一种由4×4 Mirau微干涉仪组成的有源阵列，其中参考微镜由垂直梳齿驱动微致动器承载，从而能够实现相移技术，提高灵敏度并消除不需要的干涉项。我们专注于成像系统的设计、Mirau微干涉仪的微加工和组装以及扫频源OCT成像。
