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具有独立栅极控制的石墨烯与碳纳米管异质结晶体管

Graphene and Carbon Nanotube Heterojunction Transistors with Individual Gate Control.

作者信息

Shiomi Mao, Mochizuki Yuta, Imakita Yuki, Arie Takayuki, Akita Seiji, Takei Kuniharu

机构信息

Department of Physics and Electronics , Osaka Prefecture University , Sakai 599-8531 , Japan.

出版信息

ACS Nano. 2019 Apr 23;13(4):4771-4777. doi: 10.1021/acsnano.9b01395. Epub 2019 Apr 4.

Abstract

Heterogeneously integrated nanomaterial devices show interesting characteristics for transistors and sensors due to their band diagram or steep material junctions. If these junctions and band alignments can be tuned by an electrical input bias, the device platform not only could be expanded but also could be used to explore fundamental characteristics. However, most reports on hetero-nanomaterial junctions use a global back-gate voltage, which makes it difficult to control band alignment at an interface. To explore device junctions, this study reports a laterally integrated heterojunction of graphene and a carbon nanotube (CNT) network film with individual gate electrodes to tune the band alignment corresponding to the Fermi level shift of graphene in contact with the semiconducting CNT network film. By developing the fabrication process, multiple gate structures are designed to apply a gate bias to CNTs and graphene separately. The threshold voltage shift of the CNT transistor depends on the gate voltage of graphene. Based on the thermionic emission theory, the barrier height between graphene and CNTs for both the conduction and valence band sides varies from 70 to 85 meV, with a linear change as a function of the applied gate voltage to graphene. Although the current Fermi level shift is small, this device platform may realize the exploration of fundamental properties and device concepts.

摘要

由于其能带图或陡峭的材料结,异质集成纳米材料器件在晶体管和传感器方面展现出有趣的特性。如果这些结和能带排列可以通过电输入偏置进行调节,那么该器件平台不仅可以扩展,还可用于探索基本特性。然而,大多数关于异质纳米材料结的报告使用全局背栅电压,这使得难以控制界面处的能带排列。为了探索器件结,本研究报告了一种石墨烯与碳纳米管(CNT)网络膜的横向集成异质结,该异质结带有单独的栅电极,以调节与接触半导体CNT网络膜的石墨烯的费米能级移动相对应的能带排列。通过开发制造工艺,设计了多个栅极结构,以便分别向CNT和石墨烯施加栅极偏置。CNT晶体管的阈值电压偏移取决于石墨烯的栅极电压。基于热电子发射理论,石墨烯与CNT之间导带和价带两侧的势垒高度在70至85毫电子伏特之间变化,随施加到石墨烯的栅极电压呈线性变化。尽管当前的费米能级移动很小,但该器件平台可能实现对基本特性和器件概念的探索。

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