用于CMOS图像传感器的高色纯度等离子体彩色滤光片阵列

Plasmonic Color Filter Array with High Color Purity for CMOS Image Sensors.

作者信息

Miyamichi Atsutaka, Ono Atsushi, Kagawa Keiichiro, Yasutomi Keita, Kawahito Shoji

机构信息

Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan.

Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan.

出版信息

Sensors (Basel). 2019 Apr 12;19(8):1750. doi: 10.3390/s19081750.

DOI:10.3390/s19081750

PMID:31013721

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6515349/

Abstract

We demonstrate the multiband color filtering of a standard RGB color and a complementary CMY color by a plasmonic color filter, composed of concentric corrugated metallic thin film rings. The surface plasmon resonance is excited by the periodic corrugation, and the coupled light is transmitted through the central subwavelength aperture. Color selectivity is achieved not only in the visible but also in the near-infrared (NIR) region. Therefore, simultaneous imaging with visible and NIR can be realized by the integration of plasmonic color filters with sensors. We investigate the angle of incidence dependence of the transmission color selectivity and the color purity of the fabricated plasmonic color filter array.

摘要

我们展示了一种由同心波纹金属薄膜环组成的等离子体彩色滤光片对标准RGB颜色和互补CMY颜色的多波段颜色过滤。表面等离子体共振由周期性波纹激发，耦合光通过中心亚波长孔径传输。不仅在可见光区域，而且在近红外（NIR）区域都实现了颜色选择性。因此，通过将等离子体彩色滤光片与传感器集成，可以实现可见光和近红外光的同时成像。我们研究了所制备的等离子体彩色滤光片阵列的透射颜色选择性和颜色纯度对入射角的依赖性。