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用于 CMOS 图像传感器应用的等离子体颜色滤波器。

Plasmonic color filters for CMOS image sensor applications.

机构信息

Thomas J. Watson Laboratories of Applied Physics, California Institute of Technology, Pasadena, California 91125, USA.

出版信息

Nano Lett. 2012 Aug 8;12(8):4349-54. doi: 10.1021/nl302110z. Epub 2012 Jul 17.

Abstract

We report on the optical properties of plasmonic hole arrays as they apply to requirements for plasmonic color filters designed for state-of-the-art Si CMOS image sensors. The hole arrays are composed of hexagonally packed subwavelength sized holes on a 150 nm Al film designed to operate at the primary colors of red, green, and blue. Hole array plasmonic filters show peak transmission in the 40-50% range for large (>5 × 5 μm(2)) size filters and maintain their filtering function for pixel sizes as small as ∼1 × 1 μm(2), albeit at a cost in transmission efficiency. Hole array filters are found to robust with respect to spatial crosstalk between pixel within our detection limit and preserve their filtering function in arrays containing random defects. Analysis of hole array filter transmittance and crosstalk suggests that nearest neighbor hole-hole interactions rather than long-range interactions play the dominant role in the transmission properties of plasmonic hole array filters. We verify this via a simple nearest neighbor model that correctly predicts the hole array transmission efficiency as a function of the number of holes.

摘要

我们报告了等离子体孔阵列的光学性质,这些性质适用于为最先进的 Si CMOS 图像传感器设计的等离子体彩色滤光片的要求。这些孔阵列由在 150nm Al 薄膜上排列的亚波长尺寸的六边形孔组成,旨在实现红、绿、蓝三种原色的工作。对于较大 (>5×5μm(2))尺寸的滤波器,孔阵列等离子体滤波器的峰值透过率在 40-50%范围内,并且在像素尺寸小至 ∼1×1μm(2)时仍保持其滤波功能,尽管传输效率有所降低。在我们的检测极限内,发现孔阵列滤波器对像素之间的空间串扰具有鲁棒性,并在包含随机缺陷的阵列中保留其滤波功能。对孔阵列滤波器透过率和串扰的分析表明,在等离子体孔阵列滤波器的传输特性中,相邻孔之间的相互作用而非远程相互作用起着主导作用。我们通过一个简单的最近邻模型验证了这一点,该模型正确地预测了孔阵列的透过率作为孔数量的函数。

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