Fleischman Dagny, Sweatlock Luke A, Murakami Hirotaka, Atwater Harry
Opt Express. 2017 Oct 30;25(22):27386-27395. doi: 10.1364/OE.25.027386.
The subwavelength mode volumes of plasmonic filters are well matched to the small size of state-of-the-art active pixels in CMOS image sensor arrays used in portable electronic devices. Typical plasmonic filters exhibit broad (> 100 nm) transmission bandwidths suitable for RBG or CMYK color filtering. Dramatically reducing the peak width of filter transmission spectra would allow for the realization of CMOS image sensors with multi- and hyperspectral imaging capabilities. We find that the design of 5 layer metal-insulator-metal-insulator-metal structures gives rise to multi-mode interference phenomena that suppress spurious transmission features and give rise to single transmission bands as narrow as 17 nm. The transmission peaks of these multilayer slot-mode plasmonic filters (MSPFs) can be systematically varied throughout the visible and near infrared spectrum, leading to a filter that is CMOS integrable, since the same basic MSPF structure can operate over a large range of wavelengths. We find that MSPF filter designs that can achieve a bandwidth less than 30 nm across the visible and demonstrate experimental prototypes with a FWHM of 70 nm, and we describe how experimental structure can be made to approach the limits suggested by the model.
等离子体滤波器的亚波长模式体积与便携式电子设备中使用的CMOS图像传感器阵列中最先进的有源像素的小尺寸非常匹配。典型的等离子体滤波器具有适合RGB或CMYK颜色滤波的宽(>100nm)传输带宽。大幅降低滤波器传输光谱的峰值宽度将有助于实现具有多光谱和高光谱成像能力的CMOS图像传感器。我们发现,五层金属-绝缘体-金属-绝缘体-金属结构的设计会产生多模干涉现象,该现象可抑制杂散传输特征,并产生窄至17nm的单传输带。这些多层狭缝模式等离子体滤波器(MSPF)的传输峰可以在整个可见光和近红外光谱范围内系统地变化,从而得到一种可集成到CMOS中的滤波器,因为相同的基本MSPF结构可以在很宽的波长范围内工作。我们发现,MSPF滤波器设计在可见光范围内可以实现小于30nm的带宽,并展示了半高宽为70nm的实验原型,我们还描述了如何使实验结构接近模型所建议的极限。