Choi Myung Sik, Mirzaei Ali, Bang Jae Hoon, Na Han Gil, Jin Changhyun, Kim Sang Sub, Kim Hyoun Woo
Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea.
The Research Institute of Industrial Science, Hanyang University, Seoul 133-791, Republic of Korea.
J Nanosci Nanotechnol. 2019 Oct 1;19(10):6647-6655. doi: 10.1166/jnn.2019.17091.
A new gas sensor working in room temperature, which is compatible with silicon fabrication technology is presented. Porous silicon nanowires (NWs) were synthesized by metal-assisted chemical etching method and then TeO₂ NWs branches were attached to their stem by thermal evaporation of Te powders in the presence of air. Afterwards TeO₂ branched porous Si NWs were functionalized by Pt via sputtering followed by low temperature thermal annealing. Scanning electron microscopy, transmission electron microscopy and energy-dispersive X-ray spectroscopy collectively confirmed successful formation of TeO₂ branched porous Si NWs functionalized by Pt nanoparticles. Their gas sensing properties in the presence of CO, CH and CH were tested at room temperature, for Si wafer, pristine porous Si NWs, pristine TeO₂ branched porous Si NWs, and Pt functionalized TeO₂ branched porous Si NWs sensors. Pt functionalized TeO₂ branched porous Si NWs have higher responses to all tested gases than the other sensors. The origin of high response is discussed in detail. This new room temperature gas sensor can open a new aperture for development of gas sensors with minimum energy consumption which are compatible with silicon fabrication technology.
本文介绍了一种新型的室温工作气体传感器，该传感器与硅制造技术兼容。通过金属辅助化学蚀刻法合成了多孔硅纳米线（NWs），然后在空气中通过热蒸发碲粉将二氧化碲NWs分支附着到其主干上。之后，通过溅射然后低温热退火，用铂对二氧化碲分支多孔硅NWs进行功能化。扫描电子显微镜、透射电子显微镜和能量色散X射线光谱共同证实了由铂纳米颗粒功能化的二氧化碲分支多孔硅NWs的成功形成。在室温下测试了硅片、原始多孔硅NWs、原始二氧化碲分支多孔硅NWs和铂功能化二氧化碲分支多孔硅NWs传感器在存在一氧化碳、甲烷和乙烷的情况下的气敏特性。铂功能化二氧化碲分支多孔硅NWs对所有测试气体的响应都高于其他传感器。详细讨论了高响应的起源。这种新型室温气体传感器可为开发与硅制造技术兼容的、能耗最低的气体传感器开辟新的途径。
