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微尺度气体流动中的原位测量——传统传感器还是其他?

In-Situ Measurements in Microscale Gas Flows-Conventional Sensors or Something Else?

作者信息

Brandner Juergen J

机构信息

Staff Position Microstructures and Process Sensors (MPS), Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.

出版信息

Micromachines (Basel). 2019 Apr 29;10(5):292. doi: 10.3390/mi10050292.

DOI:10.3390/mi10050292
PMID:31035685
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6562918/
Abstract

Within the last few decades miniaturization has a driving force in almost all areas of technology, leading to a tremendous intensification of systems and processes. Information technology provides now data density several orders of magnitude higher than a few years ago, and the smartphone technology includes, as well the simple ability to communicate with others, features like internet, video and music streaming, but also implementation of the global positioning system, environment sensors or measurement systems for individual health. So-called wearables are everywhere, from the physio-parameter sensing wrist smart watch up to the measurement of heart rates by underwear. This trend holds also for gas flow applications, where complex flow arrangements and measurement systems formerly designed for a macro scale have been transferred into miniaturized versions. Thus, those systems took advantage of the increased surface to volume ratio as well as of the improved heat and mass transfer behavior of miniaturized equipment. In accordance, disadvantages like gas flow mal-distribution on parallelized mini- or micro tubes or channels as well as increased pressure losses due to the minimized hydraulic diameters and an increased roughness-to-dimension ratio have to be taken into account. Furthermore, major problems are arising for measurement and control to be implemented for and/or measurements. Currently, correlated measurements are widely discussed to obtain a more comprehensive view to a process by using a broad variety of measurement techniques complementing each other. Techniques for correlated measurements may include commonly used techniques like thermocouples or pressure sensors as well as more complex systems like gas chromatography, mass spectrometry, infrared or ultraviolet spectroscopy and many others. Some of these techniques can be miniaturized, some of them cannot yet. Those should, nevertheless, be able to conduct measurements at the same location and the same time, preferably and . Therefore, combinations of measurement instruments might be necessary, which will provide complementary techniques for accessing local process information. A recently more intensively discussed additional possibility is the application of nuclear magnetic resonance (NMR) systems, which might be useful in combination with other, more conventional measurement techniques. NMR is currently undergoing a tremendous change from large-scale to benchtop measurement systems, and it will most likely be further miniaturized. NMR allows a multitude of different measurements, which are normally covered by several instruments. Additionally, NMR can be combined very well with other measurement equipment to perform correlative and measurements. Such combinations of several instruments would allow us to retrieve an "information cloud" of a process. This paper will present a view of some common measurement techniques and the difficulties of applying them on one hand in a miniaturized scale, and on the other hand in a correlative mode. Basic suggestions to achieve the above-mentioned objective by a combination of different methods including NMR will be given.

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/b2ac00cb1149/micromachines-10-00292-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/38985ceb1c26/micromachines-10-00292-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/dc568ec5600f/micromachines-10-00292-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/a91e90042c34/micromachines-10-00292-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/7e39cd938cf2/micromachines-10-00292-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/efc58925a37a/micromachines-10-00292-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/adae0e38303d/micromachines-10-00292-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/b2ac00cb1149/micromachines-10-00292-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/38985ceb1c26/micromachines-10-00292-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/dc568ec5600f/micromachines-10-00292-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/a91e90042c34/micromachines-10-00292-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/7e39cd938cf2/micromachines-10-00292-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/efc58925a37a/micromachines-10-00292-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/adae0e38303d/micromachines-10-00292-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cd33/6562918/b2ac00cb1149/micromachines-10-00292-g007.jpg
摘要

在过去几十年里,小型化几乎在所有技术领域都成为一种驱动力,促使系统和流程极大地集约化。如今,信息技术提供的数据密度比几年前高出几个数量级,智能手机技术不仅具备与他人简单通信的能力,还拥有互联网、视频和音乐流播放等功能,甚至还集成了全球定位系统、环境传感器或个人健康测量系统。所谓的可穿戴设备随处可见,从能感应生理参数的智能手表到通过内衣测量心率的设备。这种趋势在气体流动应用领域同样存在,以前为宏观尺度设计的复杂流动装置和测量系统已被转化为小型化版本。因此,这些系统利用了小型化设备增加的表面积与体积之比以及改善的传热和传质性能。相应地,也必须考虑到一些缺点,比如在并行的微型或微管或通道上气体流动分布不均,以及由于水力直径最小化和粗糙度与尺寸比增加而导致的压力损失增加。此外,对于为[具体测量内容1]和/或[具体测量内容2]测量实施测量和控制还存在重大问题。目前,人们广泛讨论相关测量,以便通过使用多种相互补充的测量技术对一个过程有更全面的了解。相关测量技术可能包括常用技术,如热电偶或压力传感器,以及更复杂的系统,如气相色谱、质谱、红外或紫外光谱等。其中一些技术可以小型化,而有些还不能。然而,这些技术应该能够在同一位置和同一时间进行测量,最好是针对[具体测量内容1]和[具体测量内容2]。因此,可能需要测量仪器的组合,以提供用于获取局部过程信息的互补技术。最近讨论得更为深入的另一种可能性是应用核磁共振(NMR)系统,它与其他更传统的测量技术结合可能会很有用。目前,NMR正在经历从大型测量系统到台式测量系统的巨大变革,并且很可能会进一步小型化。NMR允许进行多种不同的测量,这些测量通常需要几种仪器才能完成。此外,NMR可以很好地与其他测量设备结合,以进行相关的[具体测量内容1]和[具体测量内容2]测量。几种仪器的这种组合将使我们能够获取一个过程的“信息云”。本文将一方面介绍一些常见的测量技术,以及在小型化规模下应用它们的困难,另一方面介绍在相关模式下应用它们的困难。还将给出通过包括NMR在内的不同方法组合来实现上述目标的基本建议。

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