微系统中气体流动专题的社论。
Editorial for the Special Issue on Gas Flows in Microsystems.
作者信息
Colin Stéphane, Baldas Lucien
机构信息
Institut Clément Ader (ICA), Université de Toulouse, CNRS-INSA-ISAE-Mines Albi-UPS, 31400 Toulouse, France.
出版信息
Micromachines (Basel). 2019 Jul 25;10(8):494. doi: 10.3390/mi10080494.
Abstract
The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields [...].
摘要
在过去二十年中，微机电系统（MEMS）发展迅速，其涉及的气体微流动在各个技术领域中都有所应用[……]。
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