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衬底温度对磁控溅射SbSe薄膜的材料及光伏性能的影响

Effects of substrate temperature on material and photovoltaic properties of magnetron-sputtered SbSe thin films.

作者信息

Chen Shiming, Hu Xiaobo, Tao Jiahua, Xue Juanjuan, Weng Guoen, Jiang Jinchun, Shen Xiuxu, Chen Shaoqiang

出版信息

Appl Opt. 2019 Apr 10;58(11):2823-2827. doi: 10.1364/AO.58.002823.

Abstract

We studied the material and photovoltaic properties of SbSe thin films fabricated by a magnetron-sputtering method at different substrate temperatures. The films had good crystallinity at substrate temperatures over 300°C. The band-gap energies between 1.1 and 1.5 eV of the films, which were obtained by transmittance measurements, initially decreased and then increased slowly with increasing temperature. Solar cells based on the films with structures of ITO/CdS/SbSe/Au were fabricated, and the substrate temperature had significant effects on the device performance. Low crystal quality at low temperature resulted in a low short-circuit current (J), while high temperature caused Se deficiency due to evaporation, which decreased the open-circuit voltage (V). The best solar cell performance achieved an efficiency of 0.84% with a V of 0.27 V and J of 9.47  mA/cm when the substrate temperature was 325°C.

摘要

我们研究了通过磁控溅射法在不同衬底温度下制备的SbSe薄膜的材料和光伏特性。在衬底温度超过300°C时,薄膜具有良好的结晶度。通过透射率测量获得的薄膜的带隙能量在1.1至1.5 eV之间,最初随温度升高而降低,然后缓慢增加。制备了具有ITO/CdS/SbSe/Au结构的基于该薄膜的太阳能电池,衬底温度对器件性能有显著影响。低温下晶体质量低导致短路电流(J)低,而高温由于蒸发导致Se缺乏,从而降低了开路电压(V)。当衬底温度为325°C时,最佳太阳能电池性能实现了0.84%的效率,V为0.27 V,J为9.47 mA/cm² 。

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