用于衬底配置太阳能电池的高质量SbSe薄膜的可控溅射压力

Controlled Sputtering Pressure on High-Quality SbSe Thin Film for Substrate Configurated Solar Cells.

作者信息

Tang Rong, Chen Xingye, Luo Yandi, Chen Zihang, Liu Yike, Li Yingfen, Su Zhenghua, Zhang Xianghua, Fan Ping, Liang Guangxing

机构信息

Shenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.

School of Material and Metallurgical Engineering, Guizhou Institute of Technology, Guiyang 550003, China.

出版信息

Nanomaterials (Basel). 2020 Mar 22;10(3):574. doi: 10.3390/nano10030574.

DOI:10.3390/nano10030574

PMID:32235709

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7153377/

Abstract

Magnetron sputtering has become an effective method in SbSe thin film photovoltaic. Research found that post-selenization treatments are essential to produce stoichiometric thin films with desired crystallinity and orientation for the sputtered SbSe. However, the influence of the sputtering process on SbSe device performance has rarely been explored. In this work, the working pressure effect was thoroughly studied for the sputtered SbSe thin film solar cells. High-quality SbSe thin film was obtained when a bilayer structure was applied by sputtering the film at a high (1.5 Pa) and a low working pressure (1.0 Pa) subsequently. Such bilayer structure was found to be beneficial for both crystallization and preferred orientation of the SbSe thin film. Lastly, an interesting power conversion efficiency (PCE) of 5.5% was obtained for the champion device.

摘要

磁控溅射已成为制备SbSe薄膜光伏器件的一种有效方法。研究发现，后硒化处理对于为溅射的SbSe制备具有所需结晶度和取向的化学计量薄膜至关重要。然而，溅射工艺对SbSe器件性能的影响鲜有研究。在这项工作中，对溅射的SbSe薄膜太阳能电池的工作压力效应进行了深入研究。通过先后在高工作压力（1.5 Pa）和低工作压力（1.0 Pa）下溅射制备双层结构薄膜时，可获得高质量的SbSe薄膜。发现这种双层结构有利于SbSe薄膜的结晶和择优取向。最后，该最佳器件获得了5.5%的可观功率转换效率。