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使用正交偏振飞秒激光双脉冲序列操控硅表面上激光诱导周期性表面结构(LIPSS)的取向。

Manipulation of LIPSS orientation on silicon surfaces using orthogonally polarized femtosecond laser double-pulse trains.

作者信息

Liu Wei, Jiang Lan, Han Weina, Hu Jie, Li Xiaowei, Huang Ji, Zhan Shenghua, Lu Yongfeng

出版信息

Opt Express. 2019 Apr 1;27(7):9782-9793. doi: 10.1364/OE.27.009782.

DOI:10.1364/OE.27.009782
PMID:31045127
Abstract

Laser-induced periodic surface structures (LIPSS) provide an easy and cost-effective means of fabricating gratings and have been widely studied in recent decades. To overcome the challenge of orientation controllability, we developed a feasible and efficient method for manipulating the orientation of LIPSS in real time. Specifically, we used orthogonally polarized and equal-energy femtosecond laser (50 fs, 800 nm) double-pulse trains with time delay about 1ps, total peak laser fluence about 1.0 J/cm, laser repetition frequency at 100 Hz and scanning speed at 150 μm/s to manipulate the LIPSS orientation on silicon surfaces perpendicular to the scanning direction, regardless of the scanning paths. The underlying mechanism is attributed to the periodic energy deposition along the direction of surface plasmon polaritons (SPPs), which can be controlled oriented along the scanning direction in orthogonally polarized femtosecond laser double-pulse trains surface scan processing. An application of structural colors presents the functionality of our method.

摘要

激光诱导周期性表面结构(LIPSS)提供了一种制造光栅的简便且经济高效的方法,并且在近几十年中得到了广泛研究。为了克服取向可控性的挑战,我们开发了一种可行且高效的实时操纵LIPSS取向的方法。具体而言,我们使用了正交偏振且能量相等的飞秒激光(50飞秒,800纳米)双脉冲序列,时间延迟约为1皮秒,总峰值激光能量密度约为1.0焦每平方厘米,激光重复频率为100赫兹,扫描速度为150微米每秒,以操纵垂直于扫描方向的硅表面上的LIPSS取向,而与扫描路径无关。其潜在机制归因于沿表面等离激元极化子(SPP)方向的周期性能量沉积,在正交偏振飞秒激光双脉冲序列表面扫描处理中,该能量沉积可沿扫描方向进行定向控制。结构色的应用展示了我们方法的功能。

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