Xiao Chunhui, Wang Tingyuan, Wang Xiaolei, Lin Lie, Gu Bing, Zhang Nan, Liu Weiwei
Opt Express. 2021 May 10;29(10):14326-14335. doi: 10.1364/OE.423709.
Laser-induced periodic surface structure (LIPSS) is an important, high-throughput surface nano-structuring method, which has been used to fabricate various functional surfaces. In this paper, we fabricate double time-delayed orthogonally polarized femtosecond laser beams with a fixed beam power ratio of 1.5:1 that are employed to irradiate the silicon surface and curved periodic ripples with a sub-wavelength period. It is found that the local orientation of the ripples on the silicon surface can be modulated in a range of 0-80° by adjusting the fabrication parameters, such as the laser fluence, the target scanning speed, and the time delay between double laser beams. The transition from the curved ripples to the straight ripples can be achieved by increasing the target scanning speed. Different from previous studies that the curved periodic ripples are fabricated by modulating the laser polarization, the method demonstrated here utilizes the interaction between the linearly polarized subsequent laser beam and the preceding laser beam excited silicon to form curved ripples.
激光诱导周期性表面结构（LIPSS）是一种重要的高通量表面纳米结构化方法，已被用于制造各种功能表面。在本文中，我们制备了双时滞正交偏振飞秒激光束，其固定光束功率比为1.5:1，用于照射硅表面并产生具有亚波长周期的弯曲周期性波纹。研究发现，通过调整诸如激光能量密度、目标扫描速度和双激光束之间的时间延迟等制造参数，可以在0-80°范围内调制硅表面波纹的局部取向。通过提高目标扫描速度可以实现从弯曲波纹到直线波纹的转变。与以往通过调制激光偏振来制造弯曲周期性波纹的研究不同，本文展示的方法利用线偏振后续激光束与先前激光束激发的硅之间的相互作用来形成弯曲波纹。
