Javernik Andraz, Donlagic Denis
Opt Express. 2019 Apr 29;27(9):13280-13291. doi: 10.1364/OE.27.013280.
This paper presents a miniature Fabry-Perot voltage sensor created at the tip of an optical fiber. The sensor utilizes a micro-machined, all-silica, opto-mechanical structure that is flexed under the presence of attractive forces generated among charged bodies. The small dimensions and short response times of the structure provide an opportunity for measurement of the DC and AC voltages within the range of power grid frequencies. The experimental sensor length was less than 5 mm, and the sensor's sensitivity is sufficient for measurements of voltages in mid-voltage, and even low voltage, ranges. The sensor has a parabolic response to the applied voltage and can be adapted to a variety of voltage ranges by selecting the proper geometrical configuration. We demonstrate experimentally sensors with measurement ranges between 100 V and 1 KV (higher voltage ranges are also straightforwardly attainable) and with resolutions as low as 0.1 V.
本文介绍了一种在光纤尖端制作的微型法布里-珀罗电压传感器。该传感器采用了一种微机械加工的全硅光机械结构，在带电体之间产生的吸引力作用下会发生弯曲。这种结构的小尺寸和短响应时间为测量电网频率范围内的直流和交流电压提供了机会。实验中的传感器长度小于5毫米，其灵敏度足以测量中压甚至低压范围内的电压。该传感器对施加的电压具有抛物线响应，通过选择合适的几何结构可以适应各种电压范围。我们通过实验展示了测量范围在100 V至1 kV之间（更高的电压范围也可直接实现）且分辨率低至0.1 V的传感器。
