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四维扫描透射电子显微镜(4D-STEM):从扫描纳米衍射到叠层成像及其他

Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychography and Beyond.

作者信息

Ophus Colin

机构信息

National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory,1 Cyclotron Road, Berkeley, CA,USA.

出版信息

Microsc Microanal. 2019 Jun;25(3):563-582. doi: 10.1017/S1431927619000497. Epub 2019 May 14.

Abstract

Scanning transmission electron microscopy (STEM) is widely used for imaging, diffraction, and spectroscopy of materials down to atomic resolution. Recent advances in detector technology and computational methods have enabled many experiments that record a full image of the STEM probe for many probe positions, either in diffraction space or real space. In this paper, we review the use of these four-dimensional STEM experiments for virtual diffraction imaging, phase, orientation and strain mapping, measurements of medium-range order, thickness and tilt of samples, and phase contrast imaging methods, including differential phase contrast, ptychography, and others.

摘要

扫描透射电子显微镜(STEM)被广泛用于对材料进行成像、衍射和光谱分析,分辨率可达原子级别。探测器技术和计算方法的最新进展使得许多实验能够记录STEM探针在多个探针位置的完整图像,这些位置可以在衍射空间或实空间中。在本文中,我们回顾了这些四维STEM实验在虚拟衍射成像、相位、取向和应变映射、中程有序测量、样品厚度和倾斜度测量以及相衬成像方法(包括微分相衬、叠层成像术等)中的应用。

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