Geng Qiang, Wang Dien, Chen Pengfei, Chen Shih-Chi
Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong.
Nat Commun. 2019 May 16;10(1):2179. doi: 10.1038/s41467-019-10249-2.
Two-photon polymerization (TPP) is the most precise 3-D printing process that has been used to create many complex structures for advanced photonic and nanoscale applications. However, to date the technology still remains a laboratory tool due to its high operation cost and limited fabrication rate, i.e., serial laser scanning process. Here we present a revolutionary laser nanofabrication process based on TPP and an ultrafast random-access digital micromirror device (DMD) scanner. By exploiting binary holography, the DMD scanner can simultaneously generate and individually control one to tens of laser foci for parallel nanofabrication at 22.7 kHz. Complex 3-D trusses and woodpile structures have been fabricated via single or multi-focus processes, showing a resolution of ~500 nm. The nanofabrication system may be used for largescale nano-prototyping or creation of complex structures, e.g., overhanging structures, that cannot be easily fabricated via conventional raster-scanning-based systems, bringing significant impact to the world of nanomanufacturing.
双光子聚合(TPP)是最精确的3D打印工艺,已被用于为先进的光子和纳米级应用创建许多复杂结构。然而,由于其高昂的运营成本和有限的制造速度,即串行激光扫描过程,该技术至今仍只是一种实验室工具。在此,我们展示了一种基于TPP和超快随机存取数字微镜器件(DMD)扫描仪的革命性激光纳米制造工艺。通过利用二元全息术,DMD扫描仪可以同时生成并单独控制一到数十个激光焦点,以22.7kHz的频率进行并行纳米制造。复杂的3D桁架和木堆结构已通过单焦点或多焦点工艺制造出来,分辨率约为500nm。该纳米制造系统可用于大规模纳米原型制作或创建复杂结构,例如悬垂结构,这些结构难以通过传统的基于光栅扫描的系统轻松制造,对纳米制造领域产生了重大影响。