结构参数对基于128°YX铌酸锂单晶的声表面波谐振器性能的影响

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO Single Crystal.

作者信息

Geng Wenping, Zhao Caiqin, Xue Feng, Qiao Xiaojun, He Jinlong, Xue Gang, Liu Yukai, Wei Huifen, Bi Kaixi, Mei Linyu, Chou Xiujian

机构信息

Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.

School of Mechanical Engineering, North University of China, Taiyuan 030051, China.

出版信息

Nanomaterials (Basel). 2022 Jun 19;12(12):2109. doi: 10.3390/nano12122109.

DOI:10.3390/nano12122109

PMID:35745447

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9227289/

Abstract

The seeking of resonator with high Q and low insertion loss is attractive for critical sensing scenes based on the surface acoustic wave (SAW). In this work, 128° YX LiNbO-based SAW resonators were utilized to optimize the output performance through IDT structure parameters. Once the pairs of IDTs, the acoustic aperture, the reflecting grid logarithm, and the gap between IDT and reflector are changed, a better resonance frequency of 224.85 MHz and a high Q of 1364.5 were obtained. All the results demonstrate the structure parameters design is helpful for the performance enhancement with regard to SAW resonators, especially for designing and fabricating high-Q devices.

摘要

对于基于表面声波（SAW）的关键传感场景而言，寻求具有高品质因数（Q）和低插入损耗的谐振器很有吸引力。在这项工作中，基于128°YX 铌酸锂的SAW谐振器被用于通过叉指换能器（IDT）结构参数来优化输出性能。一旦改变IDT对、声学孔径、反射栅对数以及IDT与反射器之间的间隙，就可获得224.85 MHz的更佳谐振频率和1364.5的高品质因数。所有结果表明，结构参数设计有助于提高SAW谐振器的性能，特别是在设计和制造高Q值器件方面。