Gustschin Nikolai, Gustschin Alex, Meyer Pascal, Viermetz Manuel, Riederer Philipp, Herzen Julia, Mohr Jürgen, Pfeiffer Franz
Opt Express. 2019 May 27;27(11):15943-15955. doi: 10.1364/OE.27.015943.
Here we report on a non-destructive, spatially resolving and easy to implement quality and parameter control method for high aspect ratio X-ray absorption gratings. Based on angular X-ray transmission measurements, our proposed technique allows to determine the duty cycle, the transmittance, the height, as well as the local inclination of the absorbing grating structures. A key advantage of the presented method is a fast and extensive grating quality evaluation without the need of implementing an entire grating interferometer. In addition to the local and surface-based analysis using a scanning electron microscope, our non-destructive method provides global averaged macroscopic and spatially resolved grating structure information without the requirement of resolving individual grating lines.
在此，我们报告一种用于高纵横比X射线吸收光栅的无损、空间分辨且易于实施的质量和参数控制方法。基于角X射线透射测量，我们提出的技术能够确定吸收光栅结构的占空比、透射率、高度以及局部倾斜度。该方法的一个关键优势在于，无需构建完整的光栅干涉仪即可快速、全面地评估光栅质量。除了使用扫描电子显微镜进行局部和基于表面的分析外，我们的无损方法无需分辨单个光栅线，就能提供全局平均的宏观和空间分辨光栅结构信息。
