用于薄膜晶体管应用的电流体动力喷射打印机对高粘度银浆的图案化处理。

Patterning of High-Viscosity Silver Paste by an Electrohydrodynamic-Jet Printer for Use in TFT Applications.

作者信息

Can Thi Thu Thuy, Nguyen Tuan Canh, Choi Woon-Seop

机构信息

Department of Display Engineering, Hoseo University, Asan, Chungnam, 31499, Korea.

出版信息

Sci Rep. 2019 Jun 24;9(1):9180. doi: 10.1038/s41598-019-45504-5.

DOI:10.1038/s41598-019-45504-5

PMID:31235720

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6591279/

Abstract

Electrohydrodynamic (EHD) jet printing has a variety of benefits compared to conventional inkjet techniques, such as high resolution and the ability to work with high-viscosity pastes. In this work, Ag nanoparticles with 4000 cPs were chosen because they are printable on various substrates for electronic devices. The effects of additive on the high-viscosity Ag paste formulation were investigated, and pattern lines narrower than 100 μm were achieved by EHD-jet printing with an average sheet resistance of 0.027 Ω □. Furthermore, solution-processed oxide TFTs were fabricated with EHD jet-printed Ag electrodes for the first time. The electrical properties obtained were a current ratio of 1.5 × 10, a mobility of approximately 1 cm V s, a threshold voltage of 21.5 V, and a subthreshold slope of 3.05 V dec.

摘要

与传统喷墨技术相比，电液动力（EHD）喷射印刷具有多种优势，例如高分辨率以及能够处理高粘度浆料。在这项工作中，选择了粘度为4000厘泊的银纳米颗粒，因为它们可印刷在各种用于电子设备的基板上。研究了添加剂对高粘度银浆料配方的影响，通过EHD喷射印刷获得了宽度小于100μm的图案线条，平均方块电阻为0.027Ω□。此外，首次使用EHD喷射印刷的银电极制造了溶液处理的氧化物薄膜晶体管。所获得的电学性能为电流比1.5×10、迁移率约为1 cm² V⁻¹ s⁻¹、阈值电压为21.5 V以及亚阈值斜率为3.05 V dec⁻¹。