Szakmany Gergo P, Orlov Alexei O, Bernstein Gary H, Porod Wolfgang
Department of Electrical Engineering, University of Notre Dame, Notre Dame, IN, 46556, USA.
Sci Rep. 2019 Jul 3;9(1):9606. doi: 10.1038/s41598-019-46072-4.
This paper reports a two-orders-of-magnitude improvement in the sensitivity of antenna-coupled nanothermocouple (ACNTC) infrared detectors. The electrical signal generated by on-chip ACNTCs results from the temperature difference between a resonant antenna locally heated by infrared radiation and the substrate. A cavity etched under the antenna provides two benefits. It eliminates the undesirable cooling of the hot junction by thermally isolating the antenna from the substrate. More importantly, careful cavity design results in constructive interference of the incident radiation reflected back to the antenna, which significantly increases the detector sensitivity. We present the cavity-depth-dependent response of ACNTCs with cavity depths between 1 μm and 22 μm. When constructive interference is maximized, the thermal response increases by 100-fold compared to devices without the cavity.
本文报道了天线耦合纳米热电偶（ACNTC）红外探测器灵敏度提高了两个数量级。片上ACNTC产生的电信号源于被红外辐射局部加热的谐振天线与衬底之间的温差。在天线下方蚀刻出的一个腔带来了两个好处。它通过将天线与衬底热隔离，消除了热端的不良冷却。更重要的是，精心设计的腔会使反射回天线的入射辐射产生相长干涉，这显著提高了探测器的灵敏度。我们展示了腔深在1μm至22μm之间的ACNTC的腔深依赖性响应。当相长干涉最大化时，与没有腔的器件相比，热响应提高了100倍。
