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基于无纳米孔水基处理电介质的喷墨打印氧化物薄膜晶体管用于有源矩阵量子点发光二极管显示器。

Inkjet-Printed Oxide Thin-Film Transistors Based on Nanopore-Free Aqueous-Processed Dielectric for Active-Matrix Quantum-Dot Light-Emitting Diode Displays.

作者信息

Li Yuzhi, He Penghui, Chen Siting, Lan Linfeng, Dai Xingqiang, Peng Junbiao

机构信息

State Key Laboratory of Luminescent Materials and Devices , South China University of TechnologyRINGGOLD , Guangzhou 510640 , China.

出版信息

ACS Appl Mater Interfaces. 2019 Aug 7;11(31):28052-28059. doi: 10.1021/acsami.9b08258. Epub 2019 Jul 25.

Abstract

Inkjet-printed thin-film transistors (TFTs) for active-matrix light-emitting diode display are drawing much attention for the advantages of low material waste and simple fabrication processes without vacuum deposition and photolithography steps. Herein, for the first time, solution-processed quantum-dot light-emitting diode (QLED) array displays driven with the inkjet-printed oxide TFT backplane were realized and demonstrated using a general "solvent printing" method. To suppress nanopore formation in the thick oxide films, carbon-free aqueous inks were employed for gate dielectrics. No nanopore was found in the whole 120 nm-thick gate dielectrics. However, compared to the organic inks, the aqueous inks have very low viscosity, resulting in uncontrollable ink spreading especially in transline printing. The ink easily shrinks on the low-surface-energy area and spreads on the high-surface-energy area, leading to serious uniformity problems (the upper lines even break at the top of underlying lines). To solve the problem, a "solvent printing" method was employed to form coffee-line surface-energy patterns, which were uniform without shape distortion. The surface-energy patterns can restrain the ink spreading and tune the morphology of the printed films. As a result, multilayer TFT arrays with ideal shapes were achieved. The mobilities of the printed top-gate TFTs in the backplane array were 3.13 ± 0.87 cm V s for switching TFTs and 2.22 ± 0.38 cm V s for driving TFTs. Finally, an active-matrix red QLED character display based on the printed oxide TFT backplane and solution-processed QLEDs was demonstrated. The "solvent printing" method opens a general route for inkjet-printed multilayer electronic devices.

摘要

用于有源矩阵发光二极管显示器的喷墨打印薄膜晶体管(TFT),因其材料浪费低以及无需真空沉积和光刻步骤的简单制造工艺而备受关注。在此,首次使用通用的“溶剂印刷”方法实现并展示了由喷墨打印氧化物TFT背板驱动的溶液处理量子点发光二极管(QLED)阵列显示器。为了抑制厚氧化膜中纳米孔的形成,栅极电介质采用无碳水性墨水。在整个120nm厚的栅极电介质中未发现纳米孔。然而,与有机墨水相比,水性墨水的粘度非常低,导致墨水扩散难以控制,尤其是在横线印刷中。墨水很容易在低表面能区域收缩,而在高表面能区域扩散,从而导致严重的均匀性问题(上线甚至在下层线的顶部断裂)。为了解决这个问题,采用“溶剂印刷”方法形成咖啡线表面能图案,这些图案均匀且无形状变形。表面能图案可以抑制墨水扩散并调整印刷薄膜的形态。结果,获得了具有理想形状的多层TFT阵列。背板阵列中印刷的顶栅TFT的迁移率,对于开关TFT为3.13±0.87cm² V⁻¹ s⁻¹,对于驱动TFT为2.22±0.38cm² V⁻¹ s⁻¹。最后,展示了基于印刷氧化物TFT背板和溶液处理QLED的有源矩阵红色QLED字符显示器。“溶剂印刷”方法为喷墨打印多层电子器件开辟了一条通用途径。

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