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二硫化钼场效应晶体管中栅极场的温度依赖性不透明度

Temperature-Dependent Opacity of the Gate Field Inside MoS Field-Effect Transistors.

作者信息

Ji Hyunjin, Ghimire Mohan Kumar, Lee Gwanmu, Yi Hojoon, Sakong Wonkil, Gul Hamza Zad, Yun Yoojoo, Jiang Jinbao, Kim Joonggyu, Joo Min-Kyu, Suh Dongseok, Lim Seong Chu

机构信息

Department of Physics , Pusan National University , Busan 46241 , Republic of Korea.

Department of Applied Physics , Sookmyung Women's University , Seoul 04310 , Republic of Korea.

出版信息

ACS Appl Mater Interfaces. 2019 Aug 14;11(32):29022-29028. doi: 10.1021/acsami.9b06715. Epub 2019 Aug 1.

DOI:10.1021/acsami.9b06715
PMID:31313897
Abstract

The transport behaviors of MoS field-effect transistors (FETs) with various channel thicknesses are studied. In a 12 nm thick MoS FET, a typical switching behavior is observed with an / ratio of 10. However, in 70 nm thick MoS FETs, the gating effect weakens with a large off-current, resulting from the screening of the gate field by the carriers formed through the ionization of S vacancies at 300 K. Hence, when the latter is dual-gated, two independent conductions develop with different threshold voltage () and field-effect mobility (μ) values. When the temperature is lowered for the latter, both the ionization of S vacancies and the gate-field screening reduce, which revives the strong / ratio and merges the two separate channels into one. Thus, only one each of and μ are seen from the thick MoS FET when the temperature is less than 80 K. The change of the number of conduction channels is attributed to the ionization of S vacancies, which leads to a temperature-dependent intra- and interlayer conductance and the attenuation of the electrostatic gate field. The defect-related transport behavior of thick MoS enables us to propose a new device structure that can be further developed to a vertical inverter inside a single MoS flake.

摘要

研究了具有不同沟道厚度的二硫化钼场效应晶体管(FET)的输运行为。在厚度为12纳米的二硫化钼场效应晶体管中,观察到典型的开关行为,其开/关比为10。然而,在厚度为70纳米的二硫化钼场效应晶体管中,由于在300K温度下硫空位电离形成的载流子对栅极电场的屏蔽作用,栅极效应减弱,关态电流增大。因此,当后者采用双栅极时,会形成两个具有不同阈值电压()和场效应迁移率(μ)值的独立导电通道。当降低后者的温度时,硫空位的电离和栅极电场屏蔽作用均减弱,这使得强开/关比得以恢复,并将两个独立通道合并为一个。因此,当温度低于80K时,从厚二硫化钼场效应晶体管中只能看到一个阈值电压和一个场效应迁移率。导电通道数量的变化归因于硫空位的电离,这导致了与温度相关的层内和层间电导以及静电栅极电场的衰减。厚二硫化钼与缺陷相关的输运行为使我们能够提出一种新的器件结构,该结构可进一步发展为单个二硫化钼薄片内的垂直逆变器。

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