Ji Hyunjin, Moon Byoung Hee, Yi Hojoon, Oh Suar, Sakong Wonkil, Huong Nguyen Thi Thanh, Lim Seong Chu
Department of Energy Science, Sungkyunkwan University (SKKU), Suwon 16419, Republic of Korea.
Nanotechnology. 2020 Apr 3;31(25):255201. doi: 10.1088/1361-6528/ab7f7e. Epub 2020 Mar 12.
In field-effect transistors (FETs), when the thickness of the semiconducting transition metal dichalcogenides (TMDs) channel exceeds the maximum depletion depth, the entire region cannot be completely controlled by a single-gate electric field. The layer-to-layer carrier transitions between the van der Waals interacted TMD layers result in the extraordinary anisotropic carrier transport in the in-plane and out-of-plane directions. The performance of the TMD FETs can be largely enhanced by optimizing the thickness of the TMD channel as well as increasing the effective channel area through which the gate field is delivered. In this study, we investigated the carrier behavior and device performance in double-gate FETs fabricated using a 57 nm thick MoS, which is thicker than the maximum depletion depth of about 50 nm, and a much thinner 4 nm thick MoS. The results showed that in the thick MoS, the gate voltages at both ends formed two independent channels which had no synergistic effect on the device performance owing to the inefficient delivery of the vertical electric field. On the other hand, in the thin MoS channel, the double-gate voltages effectively controlled one channel, resulting in twice the carrier mobility and operation in a low electric field region, i.e. below 0.2 MV cm.
在场效应晶体管(FET)中,当半导体过渡金属二硫属化物(TMD)沟道的厚度超过最大耗尽深度时,整个区域无法被单栅电场完全控制。范德华相互作用的TMD层之间的层间载流子跃迁导致了面内和面外方向上异常的各向异性载流子输运。通过优化TMD沟道的厚度以及增加栅极电场作用的有效沟道面积,可以在很大程度上提高TMD FET的性能。在本研究中,我们研究了使用厚度为57 nm的MoS(其厚度大于约50 nm的最大耗尽深度)和更薄的4 nm厚的MoS制造的双栅FET中的载流子行为和器件性能。结果表明,在厚MoS中,两端的栅极电压形成了两个独立的沟道,由于垂直电场传递效率低下,这两个沟道对器件性能没有协同作用。另一方面,在薄MoS沟道中,双栅电压有效地控制了一个沟道,导致载流子迁移率提高了两倍,并且在低电场区域(即低于0.2 MV/cm)工作。