Geballe Laboratory for Advanced Materials, Stanford University, Stanford, CA 94305-4045, USA.
Department of Electrical Engineering, Stanford University, Stanford, CA 94305, USA.
Science. 2019 Jul 19;365(6450):257-260. doi: 10.1126/science.aax5961.
Metasurfaces offer the possibility to shape optical wavefronts with an ultracompact, planar form factor. However, most metasurfaces are static, and their optical functions are fixed after the fabrication process. Many modern optical systems require dynamic manipulation of light, and this is now driving the development of electrically reconfigurable metasurfaces. We can realize metasurfaces with fast (>10 hertz), electrically tunable pixels that offer complete (0- to 2π) phase control and large amplitude modulation of scattered waves through the microelectromechanical movement of silicon antenna arrays created in standard silicon-on-insulator technology. Our approach can be used to realize a platform technology that enables low-voltage operation of pixels for temporal color mixing and continuous, dynamic beam steering and light focusing.
超表面能够以超紧凑、平面的形式因子来塑造光波前。然而,大多数超表面都是静态的,其光学功能在制造过程后就固定了。许多现代光学系统需要对光进行动态控制,这也推动了电可重构超表面的发展。我们可以通过在标准的绝缘体上硅技术中制造的硅天线阵列的微机电运动,实现具有快速(>10 赫兹)、电可调像素的超表面,这些像素提供了完全的(0 到 2π)相位控制和对散射波的大振幅调制。我们的方法可以用于实现一种平台技术,从而能够以低电压操作像素,实现时间颜色混合、连续动态光束转向和光聚焦。