Inoue Daisuke, Ichikawa Tadashi, Kawasaki Akari, Yamashita Tatsuya
Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan.
Micromachines (Basel). 2019 Jul 18;10(7):482. doi: 10.3390/mi10070482.
We have developed a novel phase modulator, based on fin-type electrodes placed at self-imaging positions of a silicon multimode interference (MMI) waveguide, which allows reduced scattering losses and relaxes the fabrication tolerance. The measured propagation losses and spectral bandwidth are 0.7 dB and 33 nm, respectively, on a 987 μm-long phase shifter. Owing to the self-imaging effect in the MMI waveguide, the wave-front expansion to the electrode was counteracted, and therefore, the scattering loss caused by electrode fins was successfully mitigated. As a proof-of-concept for the MMI-based phase modulator applications, we performed optical modulation based on Mach-Zehnder interferometers (MZIs). The π shift current of the modulator was 1.5 mA.
我们开发了一种新型相位调制器，它基于放置在硅多模干涉（MMI）波导自成像位置的鳍型电极，可降低散射损耗并放宽制造公差。在一个987μm长的移相器上，测得的传播损耗和光谱带宽分别为0.7dB和33nm。由于MMI波导中的自成像效应，抵消了向电极的波前扩展，因此，由电极鳍引起的散射损耗得以成功减轻。作为基于MMI的相位调制器应用的概念验证，我们基于马赫-曾德尔干涉仪（MZI）进行了光调制。调制器的π相移电流为1.5mA。
