基于纳米结构ZnFeO薄膜的室温下工作的声表面波氧气传感器的研究

The Investigation of a SAW Oxygen Gas Sensor Operated at Room Temperature, Based on Nanostructured ZnFeO Films.

作者信息

Shu Lin, Jiang Tao, Xia Yudong, Wang Xuemin, Yan Dawei, Wu Weidong

机构信息

Science and Technology on Plasma Physics Laboratory, Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, Sichuan, China.

School of Physical Science and Technology, Southwest Jiaotong University, Key Laboratory of Advanced Technology of Materials, (Ministry of Education), Chengdu 610031, China.

出版信息

Sensors (Basel). 2019 Jul 9;19(13):3025. doi: 10.3390/s19133025.

DOI:10.3390/s19133025

PMID:31324036

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6650955/

Abstract

In this paper, we report a wireless gas sensor based on surface acoustic waves (SAW). For room temperature detection of oxygen gas, a novel nanostructured ZnFeO gas-sensitive film was deposited on the surface of a SAW resonator by an oblique magnetron co-sputtering method. The measurements of X-ray diffraction (XRD) and a scanning electron microscope (SEM) showed that the crystal phase composition and the microstructures of ZnFeO films were significantly affected by the content of Fe. The experimental results showed that the sensors had a good response to O at room temperature. The max frequency shift of the sensors reached 258 kHz as the O partial pressure was 20%. Moreover, X-ray photoelectron spectroscopy (XPS) was performed to analyze the role of Fe in the sensitization process of the ZnFeO film. In addition, the internal relationship between the Fe content of the film and the sensitivity of the sensor was presented and discussed. The research indicates that the nanostructured ZnFeO film has a good potential for room temperature O gas detection applications.

摘要

在本文中，我们报道了一种基于表面声波（SAW）的无线气体传感器。为了在室温下检测氧气，通过倾斜磁控共溅射法在SAW谐振器表面沉积了一种新型纳米结构的ZnFeO气敏薄膜。X射线衍射（XRD）和扫描电子显微镜（SEM）测量结果表明，ZnFeO薄膜的晶相组成和微观结构受到Fe含量的显著影响。实验结果表明，该传感器在室温下对氧气有良好的响应。当氧气分压为20%时，传感器的最大频率偏移达到258 kHz。此外，进行了X射线光电子能谱（XPS）分析以研究Fe在ZnFeO薄膜敏化过程中的作用。此外，还给出并讨论了薄膜中Fe含量与传感器灵敏度之间的内在关系。研究表明，纳米结构的ZnFeO薄膜在室温氧气检测应用中具有良好的潜力。