用于氢气和氘气检测的表面声波传感器

Surface Acoustic Wave Sensors for Hydrogen and Deuterium Detection.

作者信息

Marcu Aurelian, Viespe Cristian

机构信息

National Institute for Laser, Plasma and Radiation Physics, Magurele 077125, Romania.

出版信息

Sensors (Basel). 2017 Jun 16;17(6):1417. doi: 10.3390/s17061417.

DOI:10.3390/s17061417

PMID:28621749

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5492305/

Abstract

A delay-line-type surface acoustic wave (SAW) sensor based on a zinc oxide (ZnO) sensitive layer was developed. Two types of sensitive layers were obtained: ZnO nanowires and ZnO thin films, both deposited using laser methods (VLS-PLD and PLD, respectively) onto quartz substrates. The responses of sensors with two different nanowire lengths (300 and 600 nm) were compared with those of sensors with thin films of different thicknesses (ca. 100 and 200 nm) to different concentrations of hydrogen and deuterium. The experimental results revealed a high response at low concentrations and a rapid saturated response for nanowires, but a low response at low concentrations and a linear response to much higher gas concentrations for the thin-film-based SAW sensors.

摘要

开发了一种基于氧化锌（ZnO）敏感层的延迟线型表面声波（SAW）传感器。获得了两种类型的敏感层：ZnO纳米线和ZnO薄膜，分别使用激光方法（VLS-PLD和PLD）沉积在石英衬底上。将具有两种不同纳米线长度（300和600 nm）的传感器的响应与具有不同厚度（约100和200 nm）薄膜的传感器对不同浓度氢气和氘的响应进行了比较。实验结果表明，纳米线在低浓度下具有高响应和快速饱和响应，而基于薄膜的SAW传感器在低浓度下响应较低，对更高气体浓度呈线性响应。